Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-Hsiang Tsai

Chung-Chuan Tseng

Chia-Wei Liu

Li-Hsin Chu

Chia-Ping Lai

Li Hsin Chu

Hsin-Hung Chen

A method for manufacturing a semiconductor structure includes at least following steps. A device layer is formed on a first semiconductor substrate. The device layer is separated from the first semiconductor substrate. A dielectric layer is formed on a second semiconductor substrate. The device layer is bonded onto the dielectric layer.

Method for manufacturing semiconductor structure

A semiconductor structure includes a substrate having a trench array therein, wherein the trench array includes a plurality of outer trenches and a plurality of inner trenches, wherein each of the plurality of outer trenches has a width greater than a width of each of the plurality of inner trenches. The semiconductor structure further includes a capacitor material stack extending into the trench array.

Method of making a trench capacitor and trench capacitor

A method and structure for providing a semiconductor-on-insulator (SCOI) wafer having a buried low-K dielectric layer includes forming a device layer on a first semiconductor substrate. In various embodiments, at least a portion of the device layer is separated from the first semiconductor substrate, where the separating forms a cleaved surface on the separated portion of the device layer. In some examples, a patterned low-K dielectric layer is formed on a second semiconductor substrate. Thereafter, and in some embodiments, the separated portion of the device layer is bonded, along the cleaved surface, to the patterned low-K dielectric layer.

Semiconductor structure and related method

A method of forming a semiconductor structure includes etching a substrate to define a plurality of trench arrays in the substrate, wherein each trench array of the plurality of trench arrays includes an outer trench extending along a periphery of each trench array of the plurality of trench array and a plurality of inner trenches, the outer trench has a width greater than a width of each of the plurality of inner trenches. The method includes depositing a first conductive layer in each trench array of the plurality of trench arrays, and on a top surface of the substrate. The method includes depositing a dielectric layer over the first conductive layer. The method includes depositing a second conductive layer over the dielectric layer. The method includes patterning the second conductive layer, the dielectric layer and the first conductive layer to form a capacitor.

Method of making a trench capacitor

A semiconductor structure includes a substrate having a trench array therein. The trench array includes a plurality of outer trenches adjacent to and extending along a periphery of the trench array and a plurality of inner trenches. Each of the plurality of outer trenches has a width greater than a width of each of the plurality of inner trenches. A capacitor material stack over the trench array.

Trench capacitor layout structure and method of forming same background

A semiconductor device includes: a conductive structure, a conductive bump extending into the conductive structure and contacting the conductive structure along a first surface, the conductive bump configured to interface with an external semiconductor device at a second surface opposite the first surface, the conductive bump being wider along the first surface than the second surface.

Laterally extended conductive bump buffer

Semiconductor structure and method for manufacturing the same

A backside illuminated image sensor device structure and methods for forming the same are provided. The method for manufacturing a backside illuminated image sensor device structure includes providing a substrate and forming a polysilicon layer over the substrate. The method further includes forming a buffer layer over the polysilicon layer and forming an etch stop layer over the buffer layer. The method further includes forming a hard mask layer over the etch stop layer and patterning the hard mask layer to form an opening in the hard mask layer. The method further includes performing an implant process through the opening of the hard mask layer to form a doped region in the substrate and removing the hard mask layer by a first removing process. The method further includes removing the etch stop layer by a second removing process and removing the buffer layer by a third removing process.

Mechanisms for forming backside illuminated image sensor device structure

Embodiments of mechanisms of a backside illuminated image sensor device structure are provided. The method for manufacturing a backside illuminated image sensor device structure includes providing a substrate and forming a polysilicon layer over the substrate. The method further includes forming a buffer layer over the polysilicon layer and forming an etch stop layer over the buffer layer. The method further includes forming a hard mask layer over the etch stop layer and patterning the hard mask layer to form an opening in the hard mask layer. The method further includes performing an implant process through the opening of the hard mask layer to form a doped region in the substrate and removing the hard mask layer by a first removing process. The method further includes removing the etch stop layer by a second removing process and removing the buffer layer by a third removing process.

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Hsinchu, Taiwan

Yu-Hsiang Tsai