Taiwan Semiconductor Manufacturing Comp. Ltd.

Wistron Neweb Corporation

Yu-Chi Liu

Hung-Chih Wang

Yuan-Hsin Chi

Yin-Tun Chou

Chih-Wei Chou

Sheng-Yuan Lin

Chih-Ming Wang

Yu Tao

Chung-Yen Chen

A clamp ring including an inner periphery of increased diameter at locations where inwardly extending tabs are not located reduces the risk a workpiece that is placed in close proximity to the clamp ring or which contacts the clamp ring during processing will stick to the clamp ring.

Clamp ring and method of using clamp ring

A deposition tool includes a power cable pedestal including a pedestal body with a first surface and a second surface and a guide hole that extends through the pedestal body from the first surface to the second surface, where at least a portion of a sidewall of the guide hole has a slanted surface, and where the pedestal body is formed from a first material with a melting point that is higher than a melting point of Polyoxymethylene (POM). The deposition tool includes a bushing arranged over the guide hole, where the bushing is formed from a second material with a melting point that is higher than the melting point of POM.

Power alarm and fire loading risk reduction for a deposition tool

A wafer pod transfer assembly includes a wafer pod port to receive a wafer pod, a transfer axle coupled to the wafer pod port, a shaft receiver, a shaft coupled to the transfer axle and to the shaft receiver, a pin through the shaft receiver and through the shaft, wherein the pin comprises a first end and a second end, opposite the first end, and a pin buckle including a first loop and a second loop. The pin buckle is coupled to the pin, the first loop encircles the first end of the pin, and the second loop encircles the second end of the pin.

Wafer pod transfer assembly

An antenna system includes a first transmission line, a second transmission line, a third transmission line, a fourth transmission line, a first dipole antenna, a second dipole antenna, a third dipole antenna, a fourth dipole antenna, a fifth dipole antenna, a sixth dipole antenna, a seventh dipole antenna, and an eighth dipole antenna. Each dipole antenna is coupled through a corresponding transmission line to a feeding point. Each of the fifth dipole antenna, the sixth dipole antenna, the seventh dipole antenna, and the eighth dipole antenna is positioned between the feeding point and a corresponding one of the first dipole antenna, the second dipole antenna, the third dipole antenna, and the fourth dipole antenna. Each of the partial dipole antennas includes a positive radiation branch and a negative radiation branch. The angle between the positive radiation branch and the negative radiation branch is less than 100 degrees.

Growing community of inventors

Taoyuan, Taiwan

Yu-Chi Liu