Gudeng Precision Industrial Co., Ltd.

Yu-Chen Chu

Ming-Chien Chiu

Yung-Chin Pan

Cheng-En Chung

Chia-Ho Chuang

Hsin-Min Hsueh

Chi-Chuan Huang

A protection device for a substrate container includes a container door and a limiter for pushing against and securing a substrate, a support member and an elastic connecting component for engaging and securing the container body, and an antistatic member having elasticity interference to provide an electrostatic dissipation path as electrostatic protection for the substrate. The protection device for a substrate container improves a protection effect of a substrate stored in the substrate container, and prevents hazards to a substrate caused by vibration, dust, and static electricity.

Protection device for substrate container

Reticle box

Connector for reticle box

A reticle pod includes a body, cover, sliding-rail member, sliding-fastening member and shut-corresponding element. The sliding-rail member has a dent portion and a slot portion and defines a locked direction. The dent portion extends from the slot portion in the locked direction. The sliding-fastening member is slidably disposed at the sliding-rail member. The sliding-fastening member has a fastening portion and resilient arms. The resilient arms are inserted into a slot of the slot portion. The fastening portion has a fastening groove corresponding in height to the slot portion. An oblique-guide surface is disposed above the fastening groove. When the cover switches from an open state to a closed state, the shut-corresponding element pushes the sliding-fastening member across the oblique-guide surface and thus compresses the sliding-fastening member, allowing the shut-corresponding element to enter the fastening groove. Then, the resilient arms releases resilient potential energy whereby the sliding-fastening member rebounds.

Reticle pod

Growing community of inventors

Taipei, Taiwan

Yu-Chen Chu