Mpi Corporation

Yu-Che Cheng

Hsiu-Wei Lin

Hung-Yi Lin

A probing apparatus includes a rotating device having a plurality of platforms for supporting DUTs, a probe device having a lifting stage movable between first and second positions, and a heating device mounted to the lifting stage so as to move along with it. The platforms are synchronously revolvable in a way that the platforms move to a test position sequentially The heating device is configured in a manner that when the lifting stage moves to the first position, the heating device is located away from the platform at the test position, and when the lifting stage moves to the second position, the heating device contacts and heats the platform at the test position. Therefore, the heating device and the probe device are movable simultaneously for heating up the platform and testing the DUT respectively.

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Chu-Pei, Taiwan

Yu-Che Cheng