Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-Chan Tsai

Chun-Hsien Huang

Chen-Yuan Kao

Ken-Yu Chang

Chia-Han Lai

Hong-Ming Wu

Yu-Syuan Cai

Some implementations described herein provide a gas curtain system. The gas curtain system includes various components to prevent a gas flowing within a chamber of an interface tool from flowing through an opening into a transport carrier adjacent to the interface tool. The gas curtain system may include a gas distribution component along an edge of the opening that generates a flow of another gas across the opening towards an opposite edge of the opening. In this way, the gas from the chamber is prevented from entering the transport carrier. By preventing the gas from the chamber from entering the transport carrier, a relative humidity within an environment of the transport carrier is maintained such that condensation of moisture on one or more semiconductor wafers within the transport carrier is mitigated.

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Taipei, Taiwan

Yu-Chan Tsai