Northwestern University

Youwei Yao

Jian Cao

Melville Paul Ulmer

Xiaoli Wang

A deposition system for forming a stress distributed coating layer is provided which comprises a deposition apparatus comprising a source from which a coating material emanates, the source configured to restrict a flux of the coating material towards a backside of an optical substrate; a holder configured to hold the optical substrate; a drive system configured to provide relative translation of the source and the optical substrate; and a bias voltage power supply operably coupled to the source and the optical substrate and configured to apply a bias voltage between the source and the backside of the optical substrate. A device is operably coupled to the deposition apparatus, the device comprising a processor; and a computer-readable medium operably coupled to the processor, the computer-readable medium having computer-readable instructions stored thereon that, when executed by the processor, cause the deposition apparatus to deposit the coating material onto the backside of the optical substrate and to adjust the bias voltage between the source and the backside of the optical substrate during the deposition of the coating material as a function of relative position of the source and the optical substrate to provide a stress distributed coating layer on the backside of the optical substrate.

Stress manipulated coating for figure reshape of optical substrates

A method of forming a stress distributed coating layer is provided which comprises depositing a coating material emanating from a source at a first location on a backside of an optical substrate at a first bias voltage to provide a first coating region at the first location characterized by a first stress and depositing the coating material at a second location on the backside of the optical substrate at a second bias voltage to provide a second coating region at the second location characterized by a second stress, thereby forming a stress distributed coating layer on the backside of the optical substrate comprising the first and second coating regions. Deposition systems and coated optical substrates are also provided.

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Evanston, IL, United States of America

Youwei Yao