Commissariat a L'energie Atomique Et Aux Energies Alternatives

Riber

Youri Rousseau

Olivier Sublemontier

Christian Petit

Alain Billard

Jean-Paul Gaston

Jean-Louis Guyaux

Franck Stemmelen

Christophe Muller

Pascal Briois

Frédéric Perry

Sylvie Marguet

Jérôme Caron

The invention relates to an evaporation cell () for vacuum evaporation chamber, the evaporation cell () comprising a crucible (), the crucible () being adapted to receive a solid or liquid material to be sublimated or evaporated, heating means () to heat the material in the crucible, a nozzle () placed at an open end of the crucible (), the nozzle () comprising a frustoconical portion () having an opening () adapted for the passage of a flow of evaporated or sublimated material towards the vacuum evaporation chamber, and a cover () placed on the nozzle (), the cover () having an opening () arranged about the frustoconical portion () of the nozzle (). According to the invention, the cover () has at least one frustoconical portion () arranged about the frustoconical portion () of the nozzle (), the cover () forming a thermal barrier between the crucible () and the vacuum evaporation chamber.

Evaporation cell for vacuum evaporation chamber and associated evaporation method

A device () for coating a substrate () with nanometric sized particles, wherein the device comprises: a plurality of aerodynamic lenses able to product a jet () of nanometric sized particles, each of the aerodynamic lenses having a longitudinal axis, the aerodynamic lenses being arranged so that the various longitudinal axes are parallel and oriented in a first direction (X) defining the direction of propagation of the jet and in the form of at least two columns () offset from each other in a second direction (Y) orthogonal to the first direction, where the first and the second column each comprise at least one of the aerodynamic lenses, the at least one of the aerodynamic lenses of the first column also being offset relative to the at least one of the aerodynamic lenses of the second column in a third direction (Z) that is both orthogonal to the first direction and to the second direction.

Device for depositing nanometric sized particles onto a substrate

The invention relates to a method for controlling the divergence of a jet of particles in vacuo with an aerodynamic lens, the aerodynamic lens including at least one chamber; a diaphragm, a so-called inlet diaphragm, intended to form an inlet of the aerodynamic lens for a jet of particles, the inlet diaphragm having a given diameter (d); and another diaphragm, a so-called outlet diaphragm, intended to form an outlet of the aerodynamic lens for this jet of particles; the method including: a step for generating the jet of particles from the inlet to the outlet, in vacuo, of the aerodynamic lens; and a step for adjusting the diameter (d) of the outlet diaphragm for controlling the divergence of the jet of particles.

Process for controlling, under void, a jet of particles with an aerodynamic lens and associated aerodynamic lens

The disclosure relates to a process for depositing nanoparticles on a substrate and comprising the following steps: The disclosure also relates to a substrate obtained by said process.

Process for generating a jet of nanoparticles

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Limours, France

Youri Rousseau