Samsung Electronics Co., Ltd.

Lg Electronics Inc.

Youngsoo Choi

Woojin Kim

Kyungtae Nam

Seung Pil Ko

Hyunchul Shin

Hong Lyeol Oh

A method of fabricating a semiconductor device includes forming a magnetic tunnel junction layer including a first magnetic layer, a second magnetic layer, and a tunnel barrier layer interposed between the first and second magnetic layers, patterning the magnetic tunnel junction layer to form a magnetic tunnel junction pattern, forming an insulating layer to cover the magnetic tunnel junction pattern, and performing a thermal treatment process to crystallize at least a portion of the first and second magnetic layers. The thermal treatment process may include performing a first thermal treatment process at a first temperature, after the forming of the magnetic tunnel junction layer, and performing a second thermal treatment process at a second temperature, which is higher than or equal to the first temperature, after the forming of the insulating layer.

Method of fabricating semiconductor device

The present disclosure provides a light source apparatus, the apparatus including a light source configured to irradiate an excitation light, an optical system configured to form the excitation light, and a phosphor wheel configured to separate a plurality of colors based on the formed excitation light, wherein the phosphor wheel includes a first separation portion of light-transmitting material assembled as a separate element penetrable by a blue light of the excitation light, and integrally formed second to fourth separation portions having phosphor layer configured to reflect red, green and yellow of the excitation light.

Light source apparatus

Growing community of inventors

Seoul, South Korea

Youngsoo Choi