Boe Technology Group Co., Ltd.

Beijing Boe Display Technology Co., Ltd.

Hefei Boe Display Technology Co., Ltd.

Beijing Boe Optoelectronics Technology Co., Ltd.

Youngjin Song

Wei Li

Shifei Shen

Maomao Fang

Haitao Yang

Xin Li

Seungjin Choi

Jie Liu

Kai Yu

Meng Yang

Jeong Hun Rhee

Ziheng Yang

Yunyou Zheng

Dengtao Li

Chenglong Wu

Lin Feng

Qihui Wang

Zhongfei Bai

Shengrong Li

Yunliang Zheng

Jianxin Hou

Zhixue Dong

Shuangqiang Zhang

Yishen Wang

Xiaoyu Shen

An array substrate and a manufacturing method thereof are disclosed. The manufacturing method includes forming, on a substrate, a first metal pattern layer, a first insulating layer, a second metal pattern layer, and a second insulating layer, successively; coating a photoresist on the second insulating layer; forming a photoresist pattern and an etching protection layer, in a first region of the array substrate, the photoresist pattern exposing a part of the top surface of the second insulating layer, and being coupled to the second insulating layer through the etching protection layer; and performing etching in the first region by using the photoresist pattern as a mask to remove the etching protection layer and at least part of the second insulating layer, without etching the first insulating layer, so as to expose a part of the second metal pattern layer and form a liquid crystal diversion groove.

Array substrate and manufacturing method thereof, liquid crystal display device and manufacturing method thereof

An embodiment of the present disclosure provides a vacuum apparatus, which relates to a display technical field. The vacuum apparatus can eliminate an electrostatic adsorption between a substrate and an electrode so as to avoid damages to the substrate. The vacuum apparatus includes: a vacuum cavity; a first electrode and a second electrode located inside the vacuum cavity and opposite to each other; and positioning structures for positioning the substrate. The substrate is located between the first electrode and the second electrode and is positioned closer to the first electrode or the second electrode. The vacuum apparatus further includes an electrostatic elimination device. The electrostatic elimination device can eliminate the electrostatic adsorption between the substrate and the first electrode and/or between the substrate and the second electrode by attracting charged particles to the surface of the substrate closer to a side of the first electrode and/or the surface of the substrate closer to a side of the second electrode. The present disclosure also relates to manufacture method of the vacuum apparatus.

Vacuum apparatus for vacuum treating substrate

Disclosed is a method for manufacturing an array substrate, the array substrate and a display device which can reduce manufacturing steps of a color filter process and further reduce manufacturing steps of the display device, thereby saving manufacturing cost and time. The method for manufacturing the array substrate includes: forming a thin film transistor on a base substrate; forming a passivation layer having a via hole on a front side of the thin film transistor and forming a photo spacer on a front side of the passivation layer through a halftone mask patterning process. With this method for manufacturing the array substrate, there is no need to prepare the photo spacer on a back side of the color filter substrate. Therefore, it is possible to reduce manufacturing steps of a color filter process, which in turn further reduces manufacturing steps of the display device, thereby saving manufacturing cost and time.

Method for manufacturing array substrate, array substrate and display device

An array substrate and a fabrication method thereof, and a display panel are provided. The array substrate includes a thin film transistor, and the fabrication method includes: forming an intermediate pattern; forming a pattern including a source electrode and a drain electrode of the thin film transistor, the source electrode of the thin film transistor being located on a source electrode ohmic contact region, and the drain electrode of the thin film transistor being located on a drain electrode ohmic contact region; forming a transparent electrode material layer, the transparent electrode material layer covering a substrate including the pattern of the source electrode and the drain electrode of the thin film transistor; patterning the transparent electrode material layer, to obtain a pattern including the pixel electrode; and patterning the intermediate pattern, to remove a channel ohmic contact region, and to remove a portion of a material of the channel active pattern region, so as to form an active layer of the thin film transistor and avoid effectively the residueof the transparent electrode material or an organic matter left on the channel active pattern region.

Array substrate and fabrication method thereof, and display panel

The present disclosure provides a stripping apparatus including a cleaning device, a transition unit and a stripping device. The cleaning device includes a first cleaning unit, a second cleaning unit and a third cleaning unit. The stripping device is connected with the transition unit; the transition unit is further connected with the first cleaning unit; the first cleaning unit is further connected with the second cleaning unit; the second cleaning unit is further connected with the third cleaning unit. Temperatures of the first cleaning unit, the second cleaning unit and the third cleaning unit are gradually decreased. The temperature of the third cleaning unit is equal to the temperature of water injected into the third cleaning unit.

Stripping apparatus and method using the same to clean glass substrates

The embodiment of the invention discloses an exemplary method, in which a gate line, a gate electrode, and a pixel electrode are formed in a first step; a multilayer structure is formed on the gate line and the gate electrode in a second step; and a data line and source/drain electrodes are formed in a third step.

Method of manufacturing array substrate of liquid crystal display device

Growing community of inventors

Beijing, China

Youngjin Song