Samsung Electronics Co., Ltd.

Youngin Kim

Jongsam Kim

Seong Sil Jeong

Byungkook Yoo

Wooseong Choi

Byung-Soo Park

Sookil Park

Jonghyuk Park

Byoungho Kwon

Jungho Kim

Younghyen Lee

A manufacturing method of a semiconductor device includes: etching a substrate, thereby forming a cell trench and a dummy trench; forming a preliminary isolation structure on the substrate, wherein a first dummy recess is formed in the preliminary isolation structure and overlaps with the dummy trench; forming a lower mask layer on the preliminary isolation structure, wherein a second dummy recess is formed in the lower mask layer and overlaps with the first dummy recess; forming a dummy recess filling pattern filling the second dummy recess; forming an upper mask layer on the lower mask layer and the dummy recess filling pattern; forming a gate trench using the lower mask layer and the upper mask layer as a mask; and forming a gate structure in the gate trench.

Manufacturing method of semiconductor device including forming a recess filling pattern

A loading apparatus is provided which includes a package jig, a transfer unit, and a load port. The package jig is fixed to a package. The transfer unit includes a hand for holding the package jig and transferring the package. The package transferred by the transfer unit is loaded on the load port. The load port and the hand include first alignment pins and first alignment sockets for aligning the package to the load port.

Probe card loading apparatus and probe card managing system including the same

Probe card transfer units and probe card management apparatuses including the same may be provided. The transfer unit includes a hand part including grippers holding a package and a moving part moving the hand part. Each of the grippers includes at least one locking pin protruding from a holding bar, which extends in a direction perpendicular to the holding bar, to securely hold the package.

Package transfer unit and package management apparatus including the same

Growing community of inventors

Hwaseong-si, South Korea

Youngin Kim