Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 131,744 patents)
2 patents:
1. 11869751 - Upper electrode and substrate processing apparatus including the same
2. 11545344 - Upper electrode and substrate processing apparatus including the same