Samsung Display Co., Ltd.

Younghoon Roh

Jaemin Hong

Hanul Kwen

Pilseon Ji

Wooyoung Jung

Hanyoung Kim

Junghoon Kim

Jeunghoon Kim

Jihye Seo

Cheolgyu Jeong

Hyunseung Kang

A mask assembly for thin film deposition includes: a mask frame including an opening, the mask frame disposed surrounding the opening; and a mask unit including: first masks mounted on the mask frame, the first masks extending in a first direction; a second mask disposed on the first masks, the second mask including: one open hole; and at least one foreign substance discharge hole; and a third mask disposed on the second mask, the third mask extending in a second direction and including deposition holes, wherein the second direction crosses the first direction, and wherein a substrate is disposed on the third mask.

Mask assembly for thin film deposition

Provided is a mask frame assembly for thin film deposition. The mask frame assembly includes a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame. The support includes a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.

Mask frame assembly for thin film deposition

Growing community of inventors

Yongin-si, South Korea

Younghoon Roh