Asm IP Holding B.v.

Coavis

Younghoon Kim

Chanheum Yoon

YoungJae Kim

Jinsik Hwang

Youngchol Choi

Jongman Lee

Hayoung Cho

Haisung Lee

A thin film forming method includes: a first operation of supplying a source gas at a first flow rate into a reactor; a second operation of purging the source gas in the reactor to an exhaust unit; a third operation of supplying a reactive gas at a second flow rate into the reactor; a fourth operation of supplying plasma into the reactor; and a fifth operation of purging the reactive gas in the reactor to the exhaust unit, wherein, during the second to fifth operations, the source gas is bypassed to the exhaust unit, and a flow rate of the source gas bypassed to the exhaust unit is less than the first flow rate. According to the thin film forming method, the consumption of the source gas and the reactive gas may be reduced, and the generation of reaction by-products in the exhaust unit may be minimized.

Thin film forming method

Provided is an in-tank filter, which is a component of a fuel pump module positioned in a fuel tank of a vehicle, etc., to supply fuel to an engine. The in-tank filter includes: a filter media filtering foreign materials; an upper container made of a synthetic resin material and having a filter media insertion space therein, the filter media insertion space having a filter media inserted thereinto; a lower container made of a synthetic resin material and coupled to the upper container to block a lower portion of the upper container; and a deformation prevention reinforcing ring having a container insertion hole formed therein so as to be closely adhered to an outer side of the upper container when the upper container is inserted thereinto and preventing the upper container inserted into the container insertion hole from expanding.

In-tank filter of fuel pump module

Growing community of inventors

Chungcheongnam-do, South Korea

Younghoon Kim