New Power Plasma Co., Ltd.

Younghee Jang

Seunghee Ryu

Soonsang Hwang

Disclosed herein is an RF generator that includes an inverter including first and second switching elements controlled by a PWM control signal and converting a DC voltage having a predetermined level outputted from the DC/DC converter into an AC voltage having a predetermined level, an LC filter that outputs a sine wave resonance signal having a predetermined resonance frequency from a high frequency signal, a transformer that induces a high frequency power signal of a pulse waveform outputted from the LC filter to a secondary side, an ignition module that sets a switching frequency at the termination of an ignition mode as an ignition mode escape frequency, an operation module that applies the ignition mode escape frequency as an initial value of a switching frequency in an operation mode, and a signal controller that generates the PWM control signal by using the switching frequency.

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Osan-si, South Korea

Younghee Jang