Samsung Electro-mechanics Co., Ltd.

Semes Co., Ltd.

Young Woo Kim

Han Gon Kim

Chang Myung Ryu

Byoung Youl Min

Woo Lim Chae

Seung Keun Jun

Wang Hyeon Son

Young Jae Lee

Yong Bae Choi

Jin Ho Song

Ji Hyun Park

Gui Jin Hwang

Tae Youl Youn

Yeon Kyu Jeong

Provided are a method of automatically setting a purge mode of a side track buffer (STB) and a system for manufacturing a semiconductor wafer, and the method, performed by a system for manufacturing a semiconductor wafer including a side track buffer (STB) including a purge device for supplying inert gas to discharge a process gas of a FOUP, and a mode determination unit for determining a purge mode in which the purge device of the STB in which the FOUP is seated is able to be driven, includes identifying specifications of the purge device corresponding to a configuration of the purge device; and determining a drivable purge mode from among predetermined purge modes depending on the identified specifications of the purge device.

Method of automatically setting purge mode of STB and system for manufacturing semiconductor wafer

An article storage device includes a load port configured to load and unload a plurality of articles, a plurality of shelves configured to load the articles, a transportation robot configured to transport the articles between the load port and the shelves or between the shelves, a receiving part configured to receive operation commands of the transportation robot from an upper system, a calculating part configured to calculate a setting value of an order of priority with respect to the operation commands, and a control part configured to control the transportation robot to perform an operation command having a high setting value of an order of priority among the operation commands.

Article storage device, method of calculating setting value in order of priority of the article storage device, and method of storing article using the same

Disclosed is a fireproof shutter for opening and closing a passage between an upper story and a lower story. The fireproof shutter includes a base panel having an opening corresponding to the passage, a door for opening and closing the opening, and a guide unit for guiding the door between an open position in which the door is opened and a closed position in which the door is closed and having a predetermined inclination such that the door is closed by its own weight.

Fireproof shutter

Disclosed is a stocker for receiving a cassette. The stocker includes a shelf for receiving a cassette, a stocker robot, a teaching jig, and a teaching unit. The stocker robot includes a robot arm configured to load the cassette in the shelf and to unload the cassette from the shelf. The teaching jig is disposed in the shelf to teach the stocker robot. The teaching unit is disposed on the robot arm to acquire information for teaching the stocker robot using the teaching jig.

Stocker for receiving cassettes and method of teaching a stocker robot disposed therein

Disclosed is a PCB including an embedded capacitor and a method of fabricating the same. The long embedded capacitor is formed through an insulating layer, making a high capacitance and various capacitance designs possible.

Printed circuit board including embedded capacitor and method of fabricating same

A high frequency signal transmission line having reduced noise. Particularly, a signal transmission line of the current invention has reduced radiation noise and reflection noise, because a conventional ground guard fence line disposed between signal lines is separated into a plurality of ground line blocks that are spaced apart from each other to shield against noise.

High frequency signal transmission line having ground line blocks to reduce noise

Disclosed is a PCB having axially parallel via holes, in which an outer ground via hole, acting as a ground, is formed around a via hole for intercircuit connection in the PCB, thereby minimizing the effect of noise caused by the via hole.

Printed circuit board having axially parallel via holes

A printed circuit board (PCB) having a three-dimensional spiral inductor, which includes a plurality of insulating layers and conductor layers. The PCB comprises a plurality of coil conductor patterns made of conductive material and shaped into strips, which is provided on the plurality of conductor layers, respectively, such that the plurality of coil conductor patterns are parallel to each other and positioned on the same plane perpendicular to the conductor layers, and in which each of the plurality of coil conductor patterns is longer than an adjacent inner coil conductor pattern.

Growing community of inventors

Chungcheongnam-do, South Korea

Young Woo Kim