Taiwan Semiconductor Manufacturing Comp. Ltd.

Young-Wei Lin

Chia-Ching Lee

Chen Liang Chang

Kuo Hui Chang

Chi-Chun Peng

Yu Liang Huang

Po-Yu Su

At least one embodiment, a vacuum chuck includes a moisture gate structure that allows for moisture to escape to reduce an amount of warpage in a workpiece when present on the vacuum chuck. The moisture gate structure includes a base portion that extends laterally outward from a central vacuum portion of the vacuum chuck, and a plurality of protrusions are spaced apart from the central vacuum portion and extend outward from the base portion. End surfaces of the plurality of protrusions contact a backside surface of the workpiece (e.g., a wafer on a carrier) when the workpiece is present on the vacuum chuck. The vacuum chuck may further include one or more guide portions that act as guides such that the workpiece remains properly aligned and within position when present on the vacuum chuck.

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Taoyuan, Taiwan

Young-Wei Lin