Samsung Electronics Co., Ltd.

Korea Advanced Institute of Science and Technology

Samsung Electro-mechanics Co., Ltd.

Seoul National University

Young-tack Houng

In-sang Song

Sang-Wook Kwon

Jong-seok Kim

Sang-Hun Lee

Seok Lee

Che-Heung Kim

Kangwon Lee

Phillip Lee

Seung Seob Lee

Chang-seung Lee

Dong-kyun Kim

Jung-Eun Lee

Nam-Kyoo Park

Jung-han Choi

Suk-Mo Koo

Sun-Kyu Yu

A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.

Downward type MEMS switch and method for fabricating the same

An RF MEMS switch and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate provided with RF signal lines and a cavity, a cantilever positioned on the cavity, having one end fixed to the substrate, and a contact pad connecting the RF signal lines with the cantilever in contact with the RF signal lines when the cantilever is down driven.

RF MEMS switch and method for fabricating the same

An A/D converter is provided. The A/D converter determines a digital output value according to the resistance of the TMR device, resistance of which changes according to the magnetic field generated by at least one electrode into which current flows according to an analog input signal. Accordingly, an A/D converter to implement high resolution and high speed with low power consumption can be provided.

Analog to digital converter which uses tunneling magneto-resistive devices

An AD converter is provided. The AD converter includes a light source unit which provides an optical signal, at least one waveguide unit which consists of a photonic crystal and transmits the optical signal, a modulation unit which applies a RF signal to the at least one waveguide unit, thereby modulating an optical signal output from the at least one waveguide unit, and a digital conversion unit which converts the modulated optical signal to a digital signal. Accordingly, a compact-sized AD convert can be realized.

AD converter using photonic crystal

An Analog to Digital (AD) converter and an AD converting method are provided. The AD converter includes one or more stators, and one or more actuators that move according to an input voltage. The digital output of the AD converter is determined based on an arrangement of the stators and the positions of the actuators relative to the stators. The AD converter can achieve high resolution and/or high speed with lower power consumption.

Analog to digital converter using arrangement of stators and AD converting method

An analog-to-digital converter (ADC) is provided to determine a digital output value according to whether electric current flows between a plurality of probes, to which an input voltage is applied, and a plurality of electrodes. Therefore, high resolution and high speed operation is possible, but with lower power consumption.

Analog-to-digital conversion (ADC) based on current flow between paired probes and electrodes

An analog-to-digital (AD) converter and a voltage detecting device thereof are provided. The AD converter includes at least one voltage detecting device which outputs a signal of a frequency determined based on a magnitude of an input voltage using a resonance frequency of a resonator. The AD converter determines a digital output value depending on the output signal from the voltage detecting device. Therefore, the AD converter can achieve a high resolution and a high speed with far less power consumption.

Analog-to-digital (AD) converter using resonance frequency shifting and voltage detecting device thereof

A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

Piezoelectric RF MEMS device and method of fabricating the same

A voltage detecting device and an analog-to-digital converter (ADC) using the same are provided. The voltage detecting device determines whether input voltage is higher than threshold voltage based on contact of a strip and a membrane. Therefore, high resolution and high speed operation is possible, but with consuming lower power, and an element capable of performing the function of resistor and comparator is provided. Furthermore, a more effective ADC may be provided using the above.

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Suwon-si, South Korea

Young-tack Houng