Korea Institute of Science and Technology

Jusung Engineering Co., Ltd.

Korea Institute of Machinery & Materials

Plasmart Inc.

Samsung Electronics Co., Ltd.

Young-Rok Kim

Kak Namkoong

Jong-Oh Park

Jin-Seok Kim

Byung-Kyu Kim

Tae-Song Kim

Won-Woo Cho

Han Cheung

Nan-Young Yoon

Jae-Hyun Kim

Chul Joo Hwang

Sae-Hoon Uhm

Dae-Joong Kim

Sang-Won Lee

Yeong-Eun Yoo

Sun Min Kim

Seung-Hyun Kim

Jong Sik Kim

Jung-Hwan Kim

Yun Jung Lee

Yong-Gwan Lee

Ki-Eun Kim

Jun-hong Min

Jeong-Hwan Kim

Jin-Joong Kim

Jae-Wook Choi

Jin-Hyuk Yoo

Sun-Min Kim

Jae-Sung Yoon

Won Woo Jung

Young-Ho Seo

Jeong-Hoon Han

Yoo Seong Kim

Kyu-Hun Lee

Suk Chul Jung

Tae-Joon Jeon

Jong Kuk Han

Moon-Ki Kim

No-Won Kim

Yun-Jung Lee

Chang-Eun Yoo

Han Daewoo Apt 303-1901 Cheung

Nan-Young Samsung Hanwool Apt 106-305 Yoon

Sung-Young Jeong

Kwang-Ho Cheong

Ki-Woong Han

The present inventive concept relates to a substrate processing apparatus including a supporting part for supporting a substrate; a disk supporting a plurality of the supporting parts; a lid disposed on the disk; and a first protrusion portion coupled to the disk to protrude in an upward direction from the disk to the lid in a center region disposed inward from the supporting parts and a gap region disposed between the supporting parts.

Apparatus for processing substrate

Disclosed is an apparatus for distributing gas which is capable of uniformly injecting processing gas into a plurality of gas passages being communicated with a plurality of gas distribution holes, and an apparatus for processing substrate including the same, wherein the apparatus for distributing gas may include a body including a plurality of gas passages connected with a plurality of gas distribution holes for distributing processing gas; and at least one gas injection module connected with at least one lateral surface of the body and respectively communicated with the plurality of gas passages, wherein the gas injection module firstly buffers the processing gas supplied from the external, secondly buffers the firstly buffered processing gas, and injects the buffered processing gas into the plurality of gas passages.

Apparatus for distributing gas and apparatus for processing substrate including the same

A hybrid type filtration structure for filtering liquid includes a first active layer, a porous supporting layer and a permeable layer. The first active layer has a first nano pore inner wall of which a function group included compound is combined with. The porous supporting layer has a plurality of pores and is disposed under the first active layer. The permeable layer is disposed under the porous supporting layer. The porous supporting layer includes a plurality of lipid bilayers having membrane protein inside of the pore, a molecule of water selectively passes through the membrane protein. The first nano pore passes through the first active layer vertically. The first nano pore and the pore are connected with each other through which liquid flows.

Hybrid type filtration structure for filtering liquid

Provided are a plasma generation apparatus and a plasma generation method. The plasma generation apparatus includes a chamber including a dielectric window and a toroidal discharge space, a magnetic core disposed to surround a portion of the chamber, an induction coil disposed to wind the magnetic core, and a waveguide radiating a microwave through the dielectric window. Alternating current flowing in the induction coil forms a magnetic flux at the magnetic core, and the magnetic flux generates inductively-coupled plasma. A microwave propagating along the waveguide generates microwave plasma inside the chamber.

Plasma generation apparatus and plasma generation method

A portable device for data communication using a body as a conductor to transmit data to a receiver, the portable device includes a data receiving unit to receive data, a controller unit to control processing of data to be transmitted, a current limiting circuit to limit a current of a signal corresponding to the data to be transmitted to a predetermined value, and transmitting electrodes connected to the current limiting circuit and to contact the body to transmit the signal having the current of predetermined value to the receiver.

Method and system for data communication using a body

The present invention provides method and system for data communication in the human body and a sensor therefor. The method and system transmit information through the human body to a receiver located outside the human body using low current and voltage polarity, so that they cause no damage to the human body and achieve low power consumption and better receiving sensitivity. In addition, the sensor contains a CMOS image sensor on which all circuits are integrated without radio transmitter and antenna, so that it achieves a low-priced and small-sized capsule type endoscope.

Method and system for data communication in human body and sensor therefor

An apparatus for manufacturing a substrate includes: a transferring chamber extended along a long direction; at least one process chamber connected to the transferring chamber along the long direction; at least one load-lock chamber connected to the transferring chamber at least one side of the transferring chamber; and a transferring chamber robot moving along the long direction in the transferring chamber and transferring a substrate.

Apparatus for manufacturing substrate

A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.

Method of gap-filling using amplitude modulation radio frequency power

The present invention provides a method and apparatus for receiving data in a human body communication system. The receiving apparatus, which comprises plural receiving electrodes, selects the optimum pair of receiving electrodes when receiving data, so that it can improve quality of received information and obtain position information of a sensor in the human body.

Method and apparatus for receiving data in human body communication system

Growing community of inventors

Daejeon, South Korea

Young-Rok Kim