Samsung Electronics Co., Ltd.

Young Kuk Byun

Tae-Kyu Kim

Jang Hoon Kim

Woo Jin Jung

Young Hyeon Kim

Soo Kyung Kim

Jong Hyun Jung

Hyun Seung Ha

A method of manufacturing a semiconductor device includes forming a first lower overlay key including first and second patterns in a lower layer, forming a first upper overlay key including third and fourth patterns in an upper layer vertically disposed on the lower layer, irradiating a first measurement light to a first region of interest (ROI) over first portions of the first and second patterns to detect a first overlay error and irradiating a second measurement light to a second ROI over second portions of the first and second patterns, the second ROI being different from the first ROI, to detect a second overlay error.

Method of manufacturing semiconductor device

A method of manufacturing a semiconductor device includes forming a mold layer on a semiconductor wafer having a plurality of integrated circuit die at least partially defined therein. An etch stopper film is selectively formed on a second portion of the mold layer extending adjacent a periphery of the semiconductor wafer, but not on a first portion of the mold layer extending opposite at least one of the plurality of integrated circuit die. A preliminary pattern layer is formed on the etch stopper film and on the first portion of the mold layer. A plurality of patterns are formed in the preliminary pattern layer by selectively exposing the preliminary pattern layer to extreme ultraviolet light (EUV). Then, hole patterns are selectively formed in the first portion of the mold layer, using the exposed preliminary pattern layer and the etch stopper film as an etching mask.

Methods of manufacturing semiconductor devices from multi-device semiconductor wafers

A laser disk player performs a pause operation using a frequency generation (FG) pulse, frame address data read out from a disk and a vertical sync signal. A memory stores the frame address data read out at the time when a pause key signal is inputted. A microprocessor controls the pickup to jump back one track to the previous track and compares the currently read-out frame address data with the frame address data stored in the memory, to check the operation state of the frequency generator. If it is judged that the frequency generator for generating the FG pulse is operating abnormally, the microprocessor receives a vertical sync signal and controls the one-track jump operation of the pickup until the frame address data at a time of the pause is larger than or is equal to the frame address data read out via the one-track jumped pickup. Thus, the laser disk player performs a pause function reliably even if the frequency generator for generating the FG pulse operates abnormally.

CAV-type optical disk player having a pause function

Growing community of inventors

Suwon-si, South Korea

Young Kuk Byun