Wonik Ips Co., Ltd.

Young Jun Kim

Sang Joon Park

Won Jun Jang

Sung Ho Roh

Cheong Hwan Jeong

Tae Dong Kim

Jung Hwan Lee

The present invention relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus in which a substrate is processed at a high pressure and a low pressure. The substrate processing apparatus of the present invention includes: a process chamber () including a chamber body () which has an opened upper portion and in which an installation groove () is defined at a central side of a bottom surface () thereof, and a gate () configured to load/unload a substrate () is disposed at one side thereof, and a top lid () coupled to the upper portion of the chamber body () to define an inner space (S); a substrate support () installed to be inserted into the installation groove () of the chamber body () and having a top surface on which the substrate () is seated.

Substrate processing apparatus

The present invention relates to a substrate processing method, and more particularly, to a processing method for substrate for removing impurities from inside a thin film of a substrate and improving characteristics of the thin film.

Processing method for substrate

Disclosed is an apparatus for manufacturing semiconductors, to be used for various processes in semiconductor manufacture processing, such as the forming of layers on wafers. A tube has a processing space therein and a discharge hole at a side thereof. A boat can be loaded and unloaded through a lower opening of the tube. Susceptors are vertically separated from one another and supported within the boat, have a central hole defined in the respective centers of rotation thereof, and have a plurality of wafers stacked around a central perimeter on the respective top surfaces thereof. A supply tube is installed at the top of the boat and passes through each central hole of the susceptors, and defines discharge holes for discharging processing gas supplied from the outside onto each top surface of the susceptors.

Growing community of inventors

Pyeongtaek-si, South Korea

Young Jun Kim