Samsung Electronics Co., Ltd.

Young-ho Hwang

Dae-hee Lee

Jang-Hwan Kim

Dong-ouk Kim

Sang-yoon Soh

Dae-sung Jung

Sang-Yoon Soh

Jong-min Song

A sensor module for detecting a process environment in semiconductor equipment includes: a sensor body including a first plate and a second plate; and a sensor circuit unit in the sensor body, wherein the sensor circuit unit includes a static electricity sensor between the first plate and the second plate.

Sensor module for detecting a process environment in semiconductor equipment, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor device

A system for controlling fault tolerance may include a first controller connected to a driver, a first switch connected in parallel to the first controller, a first capacitor connected in parallel to the first switch, a second switch connected in parallel to the first capacitor and different from the first switch, a first power supply connected in parallel to the first capacitor and connected in series to the second switch, and a second capacitor connected to the first switch and a ground of the first power supply and different from the first capacitor. When the first controller is broken down, the second switch may be turned off to interrupt power supply from the first power supply, and the first switch may be turned on to discharge electric charges charged in the second capacitor.

System for controlling fault tolerance

Growing community of inventors

Hwaseong-si, South Korea

Young-ho Hwang