Samsung Electronics Co., Ltd.

Young-Hee Kim

Do-Yun Kim

Bong-Seok Moon

Min-Hwan Kim

Seung-Joo Seo

Jae-Chan Park

Han-Mei Choi

Kyung-Hyun Kim

Sang-rok Hah

Young-Ho Park

Dong-jun Kim

Byung-Hong Chung

Min-Soo Cho

Eui-Youl Ryu

Jeong-Lim Nam

In-Sun Yi

Kwang-Bok Kim

Yoo-Keun Won

Dai-Goun Kim

A method of fabricating a nonvolatile memory device includes providing an intermediate structure in which a floating gate and an isolation film are disposed adjacent to each other on a semiconductor substrate and a gate insulating film is disposed on the floating gate and the isolation film, forming a conductive film on the gate insulating film, and annealing the conductive film so that part of the conductive film on an upper portion of the floating gate flows down onto a lower portion of the floating gate and an upper portion of the isolation film.

Method of fabricating nonvolatile memory device

A lithography device including a first revolver, a second revolver and a driving device. The first revolver includes a transmittance control filter. The second revolver includes transmittance profile filter. The driving device is capable of rotating the second revolver. The first revolver is for positioning the at least one transmittance control filter in the light path. The second revolver is for positioning the at least one transmittance profile filters in the light path.

Lithography device

Disclosed is a process for preparing arrays of oligopeptide nucleic acid probes immobilized on a solid matrix by employing polymeric photoacid generator. Arrays of peptide nucleic acid probes of the invention are prepared by the steps of: (i) derivatizing the surface of a solid matrix with aminoalkyloxysilane in alcohol and attaching a linker with acid-labile protecting group on the solid matrix; (ii) coating the solid matrix with polymeric photoacid generator(PAG); (iii) exposing the solid matrix thus coated to light to generate acid for eliminating acid-labile protecting group; (iv) washing the solid matrix with alkaline solution or organic solvent and removing residual polymeric photoacid generator; and, (v) attaching a monomeric peptide nucleic acid with acid-labile protecting group to the solid matrix, and repeating the previous Steps of (ii) to (v). In accordance with the present invention, neutral peptide nucleic acid probes, as the promising substitute for conventional negatively-charged oligonucleotide probes, can be prepared by employing polymeric photoacid generator in a simple and efficient manner, while overcoming the problems confronted in the prior art DNA chip fabrication using PR system and PPA system.

Process for preparing peptide nucleic acid probe using polymeric photoacid generator

Disclosed is a method of planarizing a non-volatile memory device. After forming a floating gate structure on a cell area of a semiconductor substrate, a conductive layer, a hard mask layer and a first insulating layer are sequentially formed on the entire surface of the resultant structure. After removing the first insulating layer of the cell area to leave a first insulating layer pattern only on the peripheral circuit area, the hard mask layer of the cell area is removed. A second insulating layer is formed on the conductive layer and the insulating layer pattern to increase the height of the insulating layer on the peripheral circuit area. The second insulating layer and the first insulating layer pattern are removed until the floating gate structure is exposed, thereby planarizing the cell area and the peripheral circuit area. The conductive layer is patterned to form wordlines on both sidewalls of the floating gate structure and simultaneously, to form a gate of a logic device on the peripheral circuit area. When a CMP process for forming the wordline is carried out, the excessive polishing of the cell area adjacent to the peripheral circuit area can be prevented.

Method of planarizing non-volatile memory device

The present invention relates to a process for preparing arrays of oligopeptide nucleic acid probes immobilized on a solid matrix by employing polymeric photoacid generator. Arrays of peptide nucleic acid probes of the invention are prepared by the steps of: (i) derivatizing the surface of a solid matrix with aminoalkyloxysilane in alcohol and attaching a linker with acid-labile protecting group on the solid matrix; (ii) coating the solid matrix with polymeric photoacid generator (PAG); (iii) exposing the solid matrix thus coated to light to generate acid for eliminating acid-labile protecting group; (iv) washing the solid matrix with alkaline solution or organic solvent and removing residual polymeric photoacid generator; and, (v) attaching a monomeric peptide nucleic acid with acid-labile protecting group to the solid matrix, and repeating the previous Steps of (ii) to (v). In accordance with the present invention, neutral peptide nucleic acid probes, as the promising substitute for conventional negatively-charged oligonucleotide probes, can be prepared by employing polymeric photoacid generator in a simple and efficient manner, while overcoming the problems confronted in the prior art DNA chip fabrication using PR system and PPA system.

Growing community of inventors

Taejon, South Korea

Young-Hee Kim