Samsung Electronics Co., Ltd.

Young-hee Kim

Jung-Min Kim

Young-hwan Yun

Yong-joon Cho

Doo-heun Baek

Myung-hwan Shin

A gate is formed on a device formation region of a semiconductor substrate, and source and drain regions are formed in the device formation region of the semiconductor substrate adjacent respective sides of the gate. The gate is formed to include a gate dielectric layer, a gate conductive layer and sidewall spacers located at respective sidewalls of the gate conductive layer. An etch stop layer is formed over the source region, the drain region and the sidewall spacers of the gate to obtain an intermediate structure, and a planarized first interlayer insulating film is formed over a surface of the intermediate structure. The first insulating layer is dry etched until the etch stop layer over the source region, the drain region and the sidewall spacers is exposed to form self-aligned contact holes in the first interlayer insulating over the source region and the drain region, respectively. The etch stop layer is then wet etched to remove the etch stop layer over the source region, the drain region and the sidewall spacers, and respective contact pads are formed by filling the self-aligned contact holes with conductive polysilicon.

Method of forming a contact in a semiconductor device

An apparatus for drying semiconductor wafers includes a bath for receiving semiconductor wafers and for holding a fluid, a chamber for providing an area where vapor is flowable over the bath, a supply pipeline for supplying vapor to the chamber, a vapor discharging pipeline for expunging vapor in the chamber, a fluid discharging pipeline for draining fluid in the chamber therefrom, and a protector for maintaining a distance between the semiconductor wafers during a drying process.

Apparatus and method for drying semiconductor wafers using IPA vapor drying method

Self-diagnosis arrangement for a video display and method of implementing the same

A self-diagnostic circuit and method for implementing the same for use with a video display device to conduct a self-diagnostic test of respective hardware components such as a ROM, RAM and EEPROM within the video display device using a built-in microprocessor. The circuit allows a video display device to perform a diagnostic test on its individual hardware components within a tested video display device and to inform an operator of any malfunction thereof.

Self-diagnostic circuit for a video display and method of implementing

An image-correction circuit and method for a picture tube is disclosed including system control means for determining the rotation degree of vertical and horizontal sync signals, and outputting vertical and horizontal charging/discharging control signals and vertical and horizontal phase signals; vertical phase control means for outputting a vertical phase control signal; horizontal phase control means for outputting a horizontal phase control signal; vertical phase sync means for shifting the image vertically thereby correcting the vertical position of the image; and horizontal phase sync means for receiving the horizontal phase control signal and shifting the image horizontally thereby correcting the horizontal position of the image.

Image-correction circuit and method for picture tube

A self-diagnostic arrangement for a video display apparatus and method effectuating the same is disclosed. The apparatus according to the present invention includes a cable connector, amplifiers and a cathode ray tube and comprises a microprocessor storing information on a display status, for selectively switching signals to generate horizontal and vertical sync signals for displaying a variety of self-diagnostic displays, an on screen display IC for supplying a blanking signal and a video signal correspondingly responsive to information supplied from the microprocessor and a H/V deflection circuit for supplying on screen display video. signals to the CRT. There is also provided a method of self-diagnosis, which comprises the steps of generating internal horizontal and vertical sync.signals of predetermined frequency levels and displaying self-diagnostic screens representing video component colors and a display status.

Growing community of inventors

Suwon, South Korea

Young-hee Kim