Samsung Electronics Co., Ltd.

Young-Gwon Kim

Shigenobu Maeda

Young Yoo Heo

Myoung-Ki Ahn

Jin-Woo Ahn

Tae-yong Jo

Kiyotaka Imai

Tae-Jun Ahn

Soon-Chul Hwang

An optical module for surface inspection includes a first light source unit that illuminates a substrate with first light produced by a first light source and a first beam splitter that changes the path of the first light, a second light source unit that illuminates the substrate with second light polarized in a first direction, a direction of polarization changing unit that illuminates the substrate with the third light polarized in a second direction perpendicular to the first direction, and a detection unit that detects fourth light which is a product of the first light reflecting from the substrate, fifth light which is a product of the second light scattered from the substrate, and sixth light which is a product of the third light scattered from the substrate. The third light is produced by changing the direction of polarization of the second light reflected from the inspected substrate.

Optical module for surface inspection and surface inspection apparatus including the same

A method for fabricating a semiconductor device is provided, which includes forming a screen layer on a substrate, the screen layer including a first portion doped with a first type impurity, forming a first undoped semiconductor layer on the screen layer, forming a gate structure on the first semiconductor layer, forming a first amorphous region on both sides of the gate structure in the first semiconductor layer, and re-crystallizing the first amorphous region through performing a first heat treatment of the first amorphous region.

Semiconductor device and method for fabricating the same

Growing community of inventors

Seongnam-si, South Korea

Young-Gwon Kim