Samsung Display Co., Ltd.

Applied Materials, Inc.

Young Eun Lee

Seung Hyun Moon

Dong Wook Yang

Soo Young Choi

Hyun Yeul Lee

Tae Kyung Won

Chien-Teh Kao

Sanjay D Yadav

Hee Chul Hwang

Deok Hwa Woo

Hyungjun Kim

Suhail Anwar

Carl A Sorensen

Hyun Dae Lee

Yong Jun Park

Jongsoo Lee

Hee Chui Hwang

A fingerprint sensor includes a substrate, a light blocking layer that is on a first surface of the substrate and includes openings in a light blocking mask, and a sensor layer that is on a second surface of the substrate and includes photo sensors. A fingerprint sensing method of the fingerprint sensor includes: storing a calibration image; generating an original image, based on sensing signals from the photo sensors; performing calibration on the original image by utilizing the calibration image; and detecting a fingerprint, based on the calibrated image. The calibration image is generated by synthetizing valid regions extracted from an original calibration image corresponding to the original image.

Fingerprint sensing method, fingerprint sensor, and display device including the same

The display device comprises: a display panel displaying an image, a light blocking layer disposed under the display panel and comprising a plurality of holes, a fingerprint sensing layer disposed under the light blocking layer and comprising a plurality of fingerprint sensors receiving reflected light passing through the plurality of hole and generating a sensing signal, and a sensor driver controlling operations of the plurality of fingerprint sensors. The sensor driver compares fingerprint data generated based on a sensing signal generated from reflected light by a user's fingerprint with prestored reference data to generate a fingerprint image.

Display device

The present disclosure relates to a chemical vapor deposition system for processing large area substrates. The chemical vapor deposition system includes a chemical vapor deposition chamber comprising a chamber body having a plurality of sidewalls, a lid assembly, and a bottom. A substrate support extends upward from the bottom within the chamber body. A gas distribution plate is located within the lid assembly. One or more cleaning gas injector ports coupled to corresponding one or more inlets in the plurality of sidewalls. Each of the one or more cleaning gas injector ports has a substantially oval-shaped or circular-shaped cleaning gas nozzle configured to provide reactive species from a remote plasma source to clean an underside of the gas distribution plate.

Remote plasma source cleaning nozzle for cleaning a gas distribution plate

Embodiments of the present disclosure generally describe a method for depositing a barrier layer of SiN using a high density plasma chemical vapor deposition (HDP-CVD) process, and in particular, controlling a film stress of the deposited SiN layer by biasing the substrate during the deposition process.

CVD thin film stress control method for display application

A display panel includes a plurality of pixel areas and at least one inspection area. An incident light is irradiated onto an inspection pattern disposed in the inspection area and a reflection light reflected by the inspection pattern is detected. An optical critical dimension of the inspection pattern is calculated from the reflection light, and a dimension of a pixel pattern disposed in each pixel area is calculated from the optical critical dimension of the inspection pattern. Accordingly, the dimension of the pixel pattern may be indirectly measured from the inspection pattern.

Display substrate and method of measuring pattern dimensions of display substrate

Growing community of inventors

Hwaseong-si, South Korea

Young Eun Lee