Fairchild Korea Semiconductor Ltd.

Young-chull Kim

Chong-man Yun

Kyu-hyun Lee

Kwang-Hoon Oh

Provided are a power semiconductor device using a silicon substrate as a FS layer and a method of manufacturing the same. A semiconductor substrate of a first conductivity type is prepared. An epitaxial layer is grown on one surface of the semiconductor substrate. Here, the epitaxial layer is doped at a concentration lower than that of the semiconductor substrate and is intended to be used as a drift region. A base region of a second conductivity type is formed in a predetermined region of the epitaxial layer. An emitter region of the first conductivity type is formed in a predetermined region of the base region. A gate electrode with a gate insulating layer is formed on the base region between the emitter region and the drift region of the epitaxial layer. A rear surface of the semiconductor substrate is ground to reduce the thickness of the semiconductor substrate, thereby setting an FS region of the first conductivity type. A collector region of the second conductivity type is formed on the ground surface of the semiconductor substrate of the FS region, thereby forming an FS-IGBT.

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Incheon Meropolitan, South Korea

Young-chull Kim