Semes Co., Ltd.

Young-Chul Joung

Suk-Won Jang

Seung-Bae Lee

Jung-Won Chang

Ki-Choul An

Il-Ho Noh

Tae-Young Ha

This invention relates to a carbon nanotube producing system. A carbon nanotube producing system includes a reaction tube in which a metal catalyst and a carbon-containing gas are supplied and carbon nanotube grows on the metal catalyst by pyrolysis; an exhaust line along which a gas including the carbon nanotube grown on the metal catalyst is exhausted from the reaction tube; and a carbon nanotube trapping apparatus installed on the exhaust line and configured to trap the carbon nanotube grown on the metal catalyst by using a magnetic force.

Apparatus for trapping carbon nanotube and system and method for producing the carbon nanotube

In a substrate processing apparatus for forming thin layers on a substrate used for an organic light emitting diode, the apparatus includes a mask attaching chamber, a deposition chamber and a mask detaching chamber. The mask attaching chamber, the deposition chamber and the mask detaching chamber are provided with a transferring guide installed thereinside, and a substrate supporter for supporting the substrate moves along the transferring guide in or between the chambers. Thus, a time for processing the substrate and an area for the apparatus may be reduced. Also, the chambers are grouped in one or more, and a gate valve is installed between the grouped chambers for opening and closing a path between the grouped chambers. Accordingly, the chambers may be continuously maintained in a vacuum state when any one of the chambers is repaired.

Apparatus for processing substrate

Growing community of inventors

Suwon-shi, South Korea

Young-Chul Joung