Beijing Voyager Technology Co., Ltd.

Didi Research America, LLC

Guangzhou Woya Laideling Technology Co., Ltd.

University of California

Youmin Wang

Yue Lu

Qin Zhou

Lingkai Kong

Yufeng Wang

Sae Won Lee

Chao Wang

Anan Pan

Gary Li

Yonghong Guo

Henghui Jiang

Zuow-Zun Chen

Ming-hui Wu

Sergio Fabian Almeida Loya

Vipul Chawla

Yu-Ching Yeh

Sergio Almeida

Jihua Li

Kong Yin Ho

Yang Yang

Ming Chiang A Wu

Yibo Yu

Quin Zhou

Qin Zhuo

In one example, a Light Detection and Ranging (LiDAR) module is provided. The LiDAR module comprises a semiconductor integrated circuit comprising a micro-electromechanical system (MEMS) formed on a surface of a silicon substrate, and a controller, the MEMS comprising a polygon assembly, the polygon assembly comprising: a polygon; a support structure connected to the polygon and forming a stack with the polygon along a rotation axis; a plurality of anchors formed on the surface of the substrate; and a plurality of actuators, each actuator of the plurality of actuators being connected between the support structure and an anchor of the plurality of actuators. The controller is configured apply a voltage across each actuator of the plurality of actuators, wherein the voltage causes each actuator to exert a torque on the support structure to rotate the polygon around the rotation axis by a target rotation angle.

Solid-state light steering system

Embodiments of the disclosure provide an optical sensing system containing a diffractive optical element, and an optical sensing method using the same. For example, the optical sensing system includes a laser emitter configured to emit an optical signal. The optical sensing system further includes a steering device configured to direct the emitted optical signal toward an environment surrounding the optical sensing system. The optical sensing system additionally includes a diffractive optical element configured to diffract the optical signal returning from the environment to form a plurality of beams focusing at a plurality of spots on a focal plane. The optical sensing system additionally includes a photosensor array placed at the focal plane, configured to detect the plurality of beams diffracted by the diffractive optical element at the plurality of spots, wherein the photosensor array comprises a plurality of sensitive elements.

Diffractive light distribution for photosensor array-based lidar receiving system

Embodiments of the disclosure provide a transmitter containing a Risley prism-based scanning mechanism, an optical sensing system containing the same, and an optical sensing method using the same. For example, the optical sensing system includes a laser emitter configured to sequentially emit a series of optical signals. The optical sensing system further includes a plurality of prisms configured to receive the series of optical signals and sequentially direct the series of optical signals at different directions in an angle of view of the optical sensing system. At least one prism of the plurality of prisms is configured to rotate relative to at least one other prism of the plurality of prisms to refract the optical signals towards the respective different directions. The optical sensing system additionally includes a receiver configured to receive at least a portion of the series of optical signals reflected from an environment surrounding the optical sensing system.

MEMS actuated vibratory Risley prism for LiDAR

A transmitter for light detection and ranging (LiDAR) is provided. The transmitter includes a plurality of laser sources and a light modulator. Each of the laser sources includes interleaved emitting regions and gaps and is configured to provide a native laser beam in a respective incident direction. The light modulator is configured to receive the native laser beams from the plurality of laser sources in different incident directions and combine the native laser beams into a combined laser beam in a diffraction direction.

Transmitter having a light modulator for light detection and ranging (LiDAR)

Embodiments of the disclosure provide a transmitter containing an omni-view peripheral scanning system, an omni-view peripheral scanning system, and an optical sensing method. The optical sensing system includes an optical source configured to sequentially emit optical signals. The optical sensing system further includes an omni-view peripheral scanning system configured to receive the optical signals and sequentially direct the optical signals towards an environment following a peripheral scanning pattern. The peripheral scanning system may include a scanning mirror and a top reflector. Each optical signal may pass through the top reflector towards the scanning mirror, where the scanning mirror is configured to reflect the optical signal back onto the top reflector following a spiral pattern and the top reflector is configured to direct the optical signal towards the environment. The optical sensing system further includes a receiver configured to receive at least a portion of the optical signals reflected from the environment.

Omni-view peripheral scanning system with integrated MEMS spiral scanner

Embodiments of the disclosure provide an optical sensing system for two-dimensional (2D) environmental sensing and an optical sensing method for the optical sensing system. The optical sensing system includes a rotary base and a one-dimensional (1D) optical sensing apparatus supported by the rotary base. The 1D optical sensing apparatus includes an optical source configured to emit optical signals, a 1D MEMS scanner configured to direct the optical signals towards an environment surrounding the optical sensing system, and a receiver configured to receive at least a portion of the optical signals reflected from the environment. The rotary base is configured to drive the 1D optical sensing apparatus to rotate around a first axis to scan the optical signals in a first dimension and the 1D MEMS scanner is configured to independently rotate around a second axis to scan the optical signals in a second dimension in the 2D environmental sensing.

Spinning LiDAR with one dimensional MEMS scanner

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module of a vehicle and comprises: a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate, the MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror; and an actuator directly connected to the substrate and mechanically connected to an end portion of the micro-mirror and deformable in response to an electrical signal to generate a torque to rotate the micro-mirror around a rotation axis to reflect light emitted by a light source out of the LiDAR module or to reflect light received by the LiDAR module to a receiver.

Mirror assembly for light steering

Embodiments of the disclosure provide a scanner for steering optical beams. In certain configurations, the scanner may include a scanning mirror independently rotatable around a first axis and a second axis. In certain other configurations, the scanner may also include a first driver configured to drive the scanning mirror to rotate around the first axis. In still other configurations, the scanner may further include a second driver configured to drive the scanning mirror to simultaneously rotate around the second axis. In certain aspects, the first driver and the second driver may be different types of drivers.

System and method for driving a two-axis scanning mirror using drivers of different types

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a skeleton on a back surface of the MEMS scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a first axis, and the second pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a second axis orthogonal to the first axis.

Two-axis scanning mirror using piezoelectric drivers and serpentine torsion springs

Embodiments of the disclosure provide optical sensing systems, optical sensing methods, and integrated transmitter/receiver (TX/RX) modules. An exemplary optical sensing system includes an integrated TX/RX module and a controller coupled to the integrated TX/RX module. The integrated TX/RX module includes a laser emitter, one or more optics, and a receiver frontend. The laser emitter is configured to emit an optical signal toward the one or more optics. The one or more optics are configured to form the optical signal received from the laser emitter into a predefined shape and direct the optical signal having the predefined shape to an environment surrounding the optical sensing system. The receiver frontend is configured to receive a returned optical signal from the environment and convert the returned optical signal into an electrical signal. The laser emitter, the one or more optics, and the receiver frontend are assembled in a single package.

Integrated transmitter and receiver module for LiDAR system

Embodiments of the disclosure provide magnetic sensing systems and methods for a polygon scanner. An exemplary magnetic sensing system includes a disc permanent magnet configured to provide a magnetic field. The magnetic sensing system further includes a Hall sensor configured to generate a voltage proportional to the strength of the magnetic field as the Hall sensor and the disc permanent magnet move relatively to each other when the polygon mirror rotates. One of the disc permanent magnet and the Hall sensor locates on and rotates with the polygon mirror and the other locates off the polygon mirror. The magnetic sensing system also includes at least one controller configured to determine a rotation angle of the polygon mirror based on the generated voltage by the Hall Sensor.

Magnetic sensing for a polygon mirror using a hall sensor for LiDAR system

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of looped torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of looped torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a first axis. The second pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a second axis orthogonal to the first axis.

Two-axis scanning mirror using piezoelectric drivers and looped torsion springs

A MEMS-based Wavelength Selectable Switch (WSS), used classically for demultiplexing fiber optic communications, is re-purposed to act as a filter. A light emitter provides a light beam with its wavelength detected by a wavelength detector. A light condenser directs reflected light from the light emitter to an input of the WSS. The WSS is controllable to provide a selected wavelength band to a selected output of the WSS, where it is detected by a photodetector. Other wavelengths are discarded by the WSS at other outputs. A controller is configured to control the WSS to select the selected wavelength band based on a detected wavelength from the wavelength detector.

MEMS wavelength selectable switch for adaptive wavelength filtering

Embodiments of the disclosure provide an optical sensing system, a method for controlling a receiver gain in the optical sensing system, and a receiver in the optical sensing system. The exemplary optical sensing system includes a transmitter configured to emit light beams at a plurality of vertical detection angles to scan an object. The optical sensing system further includes a receiver having a detector configured to detect the light beams returned by the object. The optical sensing system also includes a controller configured to dynamically vary a gain of the detector for detecting the light beams of the respective vertical detection angles.

Dynamic receiver gain control for LiDAR system

A microelectromechanical system MEMS structure is described. A first actuator is attached to a substrate and configured to rotate the substrate along a first axis of rotation. An array of rotatable MEMS mirrors is mounted on the substrate, aligned parallel to the first axis of rotation. Each rotatable MEMS mirror is rotatable about a second axis of rotation with each second axis of rotation being perpendicular to the first axis of rotation and parallel to every other axis of rotation. An array of second actuators is configured to rotate each of the rotatable MEMS mirrors about its corresponding second axis of rotation. A controller is configured to control the first actuator to rotate the substrate about the first axis of rotation. The controller further controls the array of second actuators to rotate each rotatable MEMS mirror of the array of rotatable MEMS mirrors about its corresponding second axis of rotation.

Growing community of inventors

Berkeley, CA, United States of America

Youmin Wang