Taiwan Semiconductor Manufacturing Comp. Ltd.

You-Wei Shen

Yao-Chin Lee

King-Chuan Sun

Hsing-Hung Lee

Young-Cheng Chen

Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.

System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment

In an operating software system that provides one or more software components for use by a plurality of software programs, a method of providing an upgraded version of a software component for use by one or more of the software programs while at the same time allowing other programs of the plurality of programs to continue to operate with the older version. The method is particularly suitable for upgradingomponentbjectodels (COM's) as used in the Windows&#xae; operating system.

Method for upgrading software components without system shutdown

The present disclosure relates generally to the field of semiconductor manufacturing. In one example, in a production flow of low-volume, high-precision semiconductor products, a method for controlling critical dimensions of a semiconductor product during a semiconductor processing operation in the production flow, the semiconductor processing operation requiring a desired energy value to achieve the critical dimensions includes: measuring a previously formed critical dimension on the product; calculating a first energy value based on the measured critical dimension and a desired critical dimension for the semiconductor processing operation; and obtaining the desired energy value based on the calculated first energy value and a previously-obtained desired energy for the semiconductor processing operation performed on a prior product in the production flow.

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Hsinchu, Taiwan

You-Wei Shen