Pusan National University

You Sil Lee

Se Young Jeong

Su Jae Kim

Sang Eon Park

Mi Yeon Cheon

There are provided a large-area single-crystal silver thin-film structure using a single-crystal copper thin-film buffer layer, and a method for manufacturing same. The large-area single-crystal silver thin-film structure includes a transparent substrate; a single-crystal copper thin-film buffer layer formed by deposition on the transparent substrate; and a single-crystal silver thin-film layer deposited on the single-crystal copper thin-film buffer layer and having a certain directionality.

Large-area single-crystal silver thin-film structure using single-crystal copper thin-film buffer layer and manufacturing method therefor

There is provided an RF sputtering apparatus for controlling an atomic layer of a thin film. The RF sputtering apparatus includes: a sputtering main body including a substrate, a target facing the substrate, and a chamber for performing a sputtering process to deposit the target on the substrate; a power supply unit connected to the target of the sputtering main body via a network to apply RF power; a roughing pump unit for forming vacuum inside the chamber of the sputtering main body; and a gas supply unit for supplying reaction gas to the inside of the chamber. A power cable for supplying a power source to the power supply unit is formed with a single crystal copper wire.

Growing community of inventors

Busan, South Korea

You Sil Lee