Taiwan Semiconductor Manufacturing Comp. Ltd.

You-Lin Chu

Fu-Liang Yang

Chenming Hu

Kuo-Nan Yang

Hou-Yu Chen

Yi-Ling Chan

Yi-Ling Chang

A semiconductor structure and a method for its manufacture are provided. In one example, the structure includes a well region doped with a first type dopant (e.g., a P-type or N-type dopant). A gate pedestal formed over the well region has two ends, one of which at least partially overlies the well region and is doped with the first type dopant. A dielectric layer is positioned between the gate pedestal and the well region. Source and drain regions formed on opposite sides of the gate pedestal within the well region are doped with a second type dopant opposite in type to the first type dopant.

High performance tunneling-biased MOSFET and a process for its manufacture

A new type of partially-depleted SOI MOSFET is described in which a tunneling connection between the gate and the base is introduced. This is achieved by using a gate dielectric whose thickness is below its tunneling threshold. The gate pedestal is made somewhat longer than normal and a region near one end is implanted to be P&plus; (or N&plus; in a PMOS device). This allows holes (electrons for PMOS) to tunnel from gate to base. Since the hole current is self limiting, applied voltages greater than 0.7 volts may be used without incurring excessive leakage (as is the case with prior art DTMOS devices). A process for manufacturing the device is also described.

High performance PD SOI tunneling-biased MOSFET

Growing community of inventors

Taizhong, Taiwan

You-Lin Chu