Ngk Spark Plug Company, Limited

Yosuke Shinozaki

Akifumi Tosa

Keisuke Okugawa

Kaname Miwa

Yasuhiko Inui

Toshihisa Nomura

Naoya Uemura

Kohei Yamamoto

A multilayer heating body () includes a ceramic substrate (), an electrode (), heaters (), terminals (), and an electricity supply path (). Through vias which constitute the electricity supply path include at least one combination of through vias &#x3b1;, &#x3b2;, &#x3b3;, and &#x3b4; which meets the following conditions (1) and (2). Condition (1): when the ceramic substrate is viewed from the front surface (3) side toward the back surface (3) side, the through via &#x3b4; is located at a position where the through via &#x3b4; overlaps the through via &#x3b2;, or in the vicinity of the through via &#x3b2;. Condition (2): when the ceramic substrate is viewed from the front surface side toward the back surface side, the through via &#x3b3; is located at a position between the through via &#x3b1; and the through via &#x3b4;, or located at a position where the through via &#x3b3; overlaps the through via &#x3b1;, or in the vicinity of the through via &#x3b1;.

Multilayer heating body

As viewed in plane, a ceramic heater includes zone heat-generating elements disposed in respective heating zones so as to heat a ceramic substrate independently. In the heating zone having a hole region, the zone heat-generating element is formed of a linear heat-generating conductor which has parallel segments disposed in parallel, and a turning-back segment which connects, while turning back, the parallel segment of the heat-generating conductor extending toward the hole region to the adjacent parallel segment of the heat-generating conductor so as to prevent the parallel segment extending toward the hole region from overlying the hole region.

Ceramic heater and electrostatic chuck

An electrostatic chuck includes: a body substrate having a substrate front surface and a substrate rear surface and made of ceramic; an attraction electrode provided in the body substrate; a metal base having a base front surface and a base rear surface, and placed such that the base front surface faces the substrate rear surface of the body substrate; and an internal through hole formed so as to penetrate the base front surface and the base rear surface of the metal base. The body substrate has a plurality of heating regions in each of which a heater electrode is provided. In the internal through hole, a plurality of heater electrode terminals are provided which are electrically connected to the heater electrode in each heating region. The plurality of heater electrode terminals provided in the internal through hole are electrically connected to a connection member provided in the internal through hole.

Electrostatic chuck

Growing community of inventors

Tajimi, Japan

Yosuke Shinozaki