Showa Denko K.k.

Citizen Seimitsu Co., Ltd.

Yosuke Sato

Kazuyuki Haneda

Kunizo Watanabe

The disk-shaped substrate inner circumference polishing method for polishing an inner circumference of a disk-shaped substrate including a portion having an opening hole at the center thereof includes inserting a brush having a shaft core into the portion having the opening hole of the disk-shaped substrate; fixing one end and the other end of the brush to a pair of rotating shafts that are provided at mutually detached positions and pulling at least any one of the one end and the other end of the brush and applying tension in the axial direction to the shaft core of the brush; and rotating the brush and polishing the inner circumference of the disk-shaped substrate.

Disk-shaped substrate inner circumference polishing method

The polishing apparatus that polishes an inner circumferential surface of a disk-shaped substrate including a portion having a hole at the center thereof, the polishing apparatus is provided with: a rotating table that holds piled workpieces in which a plurality of disk-shaped substrates are piled, a polishing brush that is inserted into a portion having the hole of the disk-shaped substrates of the piled workpieces and is rotated, a cover member that covers the piled workpieces, and a polishing-liquid flowing-in unit that flows polishing liquid into the portion having the hole of the disk-shaped substrates of the piled workpieces covered by the cover member.

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Minamitsuru-gun, Japan

Yosuke Sato