Olympus Corporation

Yosuke Oka

Daisuke Matsuo

Yoshitaka Kamiya

Kenzi Murakami

The present invention provides an optical deflector capable of reducing a temperature drift of a strain gauge due to a temperature gradient, and detecting with high accuracy an angular displacement of a mirror surface. The optical deflector includes a movable plate, two fixed portions which are disposed at an outer side of the movable plate, two elastic supporting members which are disposed to be substantially symmetric about a center line of the movable plate, and which connect the movable plate and the two fixed portions, an angular-displacement detecting portion having a Wheatston bridge as a measuring portion which includes two active resistors, and two reference resistors, and detects an angular displacement of the movable plate, and at least one resistor element is provided on the elastic supporting portion. All of the four resistor elements are in an isothermal characteristics area.

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Hachioji, Japan

Yosuke Oka