Sheffield Measurement Division

Yosuke Murata

Freddie L Raleigh

Frederick K Bell

A coordinate measuring machine (10) having laser interferometers (80, 176, 196) arranged to measure 'X' and 'Y' carriage and probe motions, in which fiber optic cables (66,72) are used to deliver a laser beam from a laser beam generator (60) to at least some of the interferometers (2176, 196) in order to simplify the optical system and avoid the need for precision alignment of optical components in directing the beam from the laser generator (60) to the various interferometers (176, 196). The laser generator (60) is mounted either on or off the machine base (12). A special clamp (76) and adjustment flexure (74) is used to mount and align the fiber optic cable couplings (96) to beam splitters (64) dividing the laser beam from the laser generator (60) for use along each axis.

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Centerville, OH, United States of America

Yosuke Murata