Sinfonia Technology Co., Ltd.

Tokyo Electron Limited

Yosuke Muraguchi

Minoru Maeda

Takashi Fujiwara

Mamoru Kosaki

Takayoshi Fujii

Satoru Kawakami

Yasushi Muragishi

Hiroshi Takizawa

Takashi Fukunaga

Yasuhiro Sakai

Yushi Sato

Toshio Miki

Yasuhiro Tobe

Katsumi Yasuda

Yasumichi Mieno

Yasuyoshi Kitazawa

Shinji Matsubayashi

Kazunari Kitaji

A linear actuator is provided that has a configuration capable of inhibiting contact between an inner core and a plate spring that is connected to the inner core and an outer core, and which is realized by a configuration that is easy to assemble. A stator is arranged in an opening section of a through-hole in the inner core, and has a spacer through which a shaft passes. An outer frame section of the plate spring is connected to the outer core, and a fixed section of the plate spring is connected to the inner core through the spacer in a state in which the shaft passes therethrough. The spacer includes a penetration section having an insertion hole which the shaft is inserted through, and restriction sections and which restrict a displacement of a predetermined amount or more of the plate spring to the inner core side.

Linear actuator

A conveying apparatus includes: a housing; a movable member; a linear motor; and a cover. The linear motor includes a primary magnetic pole and a secondary magnetic pole each having a facing surface that faces the other and that is a plane along the longitudinal direction of the housing. The cover allows the primary magnetic pole to be located in an atmospheric environment, and the secondary magnetic pole to be located in a vacuum environment or a reduced pressure environment by separating the primary magnetic pole and the secondary magnetic pole from each other. The primary magnetic pole and the secondary magnetic pole face each other so that a direction of a magnetic attraction force generated therebetween and acting on their facing surfaces is different from directions of forces acting, due to an atmospheric pressure outside the housing, on the wall of the housing on which the cover is provided.

Conveying apparatus

To provide a conveying apparatus that includes: a fixed section; a movable section movable with respect to the fixed section; and a pair of linear motors each located so as to be partially included in the fixed section and the movable section. Each linear motor includes a primary magnetic pole section and a secondary magnetic pole section, and these pole sections are arranged to face each other so as to enable the movable section to move with respect to the fixed section. The movable section includes a movable body capable of conveying a conveyed object, and one of the magnetic pole sections of each linear motor. Each linear motor is located at each of opposite ends of the movable body in a width direction that is orthogonal to a moving direction, and the fixed section includes the other of the magnetic pole sections.

An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section () of which inside is held in vacuum, a placing section () that is disposed inside the vacuum section () and is capable of placing a workpiece thereon, a linear motor) that includes coils () and makes the placing section () travel within the vacuum section, wherein air is placed inside the placing section () while being isolated from the vacuum section (), and the coils () of the linear motor () are disposed inside the placing section ().

Vacuum processing apparatus

A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power supply mechanism including a primary side mechanism disposed outside the vacuum chamber for supplying electric power to the driving source and a secondary side mechanism disposed in the vacuum chamber for receiving the electric power from the primary side mechanism in a contactless relationship, and a vessel capable of accommodating airtightly the secondary side mechanism under a second pressure higher than the first pressure.

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Tokyo, Japan

Yosuke Muraguchi