Gigaphoton Inc.

Yosuke Fujimaki

Takashi Ito

Makoto Tanaka

Yousuke Kawagoe

A narrowed-line gas laser apparatus includes a laser chamber that accommodates a pair of electrodes disposed so as to face each other, an output coupling mirror, and a line narrowing apparatus that forms an optical resonator along with the output coupling mirror, the line narrowing apparatus including an optical system having a first region and a second region on which a first portion and a second portion of a light beam that exits out of the laser chamber are incident, the first and second portions passing through different positions in a direction in which the pair of electrodes face each other, the optical system being configured to suppress an increase in the distance between the optical path axis of the first portion and the optical path axis of the second portion.

Narrowed-line gas laser apparatus and method for manufacturing electronic devices

A laser chamber of a discharge-excitation-type gas laser apparatus may include a container which contains laser gas therein; a pair of discharge electrodes arranged in the container; a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades.

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Oyama, Japan

Yosuke Fujimaki