Hitachi-kokusai Electric Inc.

Yoshiyuki Oshida

Naoya Fujimoto

Norikazu Kato

Naoto Takahashi

Sunao Egashira

Tsuyoshi Takeda

Manabu Nakamura

Takeshi Okada

Kenji Nasu

Kenichi Sekimukai

There is provided a terminal device for displaying status information of a plurality of RF generators. On a display screen, numerical values of a specific item of the status information are displayed as figures having different lengths, and values of another item different from the specific item are displayed in at least one of color tones, patterns, or shapes of the figures, and when the specific item is a frequency and the another item is a phase, output powers of the plurality of RF generators are displayed as figures of bar graphs over the frequency, and phases of the RF generators are displayed in at least one of color tones, patterns, or shapes of the corresponding figures.

Terminal device and RF power supply device

A radio frequency (RF) generator device for supplying RF powers of different frequencies to multiple antennas disposed in a chamber is provided. The RF generator device includes a plurality of RF generators configured to supply the RF powers of the different frequencies to the multiple antennas, and a plurality of RF controllers configured to control the RF generators, respectively. Each of the RF controllers includes a fast Fourier transformer, and a filter. The fast Fourier transformer performs fast Fourier transform on a signal introduced as a reflected wave to decompose the signal into frequency components, and the filter removes waves having frequency components that are not outputted from the corresponding RF generator.

RF generator device and substrate processing apparatus

The RF generator is provided with a first RF power source and a second RF power source that generate RF waves of different frequencies from each other, and respectively supply RF power to a first antenna and a second antenna that are installed in a plasma reactor. The first RF power source is provided with a first computing circuit that detects a first forward wave level and a first reflected wave level by removing an oscillation frequency component and an interference wave component of the second RF power source, a second computing circuit that detects a second forward wave level and a second reflected wave level that include an oscillation frequency of the first RF power source and the oscillation frequency component and the interference wave component of the second RF power source, and an interference wave computing circuit that, on the basis of the second forward wave level and the second reflected wave level, and the first forward wave level and the first reflected wave level, calculates an interference wave level to be detected by the first RF power source.

RF generator

To provide a RF generating apparatus that enables apparatus size to be decreased and the cost reduced thereby while also improving power efficiency by performing a stable matching operation, and to provide a plasma treatment apparatus using said apparatus. This RF generating apparatus comprises a plurality of RF generators and matching units, the matching units being provided with only variable-capacity capacitors connected in parallel, thereby reducing the number of elements in terms of the variable-capacity capacitors. A matching calculation section for the RF generators determines, on the basis of traveling waves and reflection waves detected by a detection circuit, the capacity values of the variable-capacity capacitors for the matching units, while adjusting and determining the oscillation frequencies for oscillation circuits in the RF generators so as to decrease the level of the reflection waves. The plasma treatment apparatus uses this RF generating apparatus.

RF generating apparatus and plasma treatment apparatus

A matching device includes a directional coupler, a matching circuit including a first variable capacitance capacitor and a second variable capacitance capacitor, and a control unit. The control unit calculates a reflection coefficient on the basis of a forward power and a reflected power that are detected by the directional coupler, changes the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor such that the calculated reflection coefficient becomes smaller, and makes the cycle of calculation of the set values of the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor shorter than the cycle of acquisition of the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor.

Matching device

A matching box comprises a directional coupler that detects forward waves and reflected waves; a matching circuit having a first variable capacitance capacitor, a second variable capacitance capacitor, and inductance; and a control unit that calculates a reflection coefficient on the basis of the forward waves and the reflected waves, and controls a capacitance value VCof the first variable capacitance capacitor and a capacitance value VCof the second variable capacitance capacitor, wherein the control unit changes VCif the distance between a matching circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, and the calculated reflection coefficient is greater than a prescribed value, and changes VCif such distance is set to be no greater than the prescribed value and when the value of such distance becomes no greater than the prescribed value, thereby reducing the reflection coefficient.

Matching box and matching method

An RF generator includes: a modulation circuit outputting a pulsed RF signal; a variable attenuation circuit adjusting the level of the pulsed RF signal; an output power detecting unit detecting an output power value of the power output from the device; a first comparative arithmetic circuit outputting a first level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a first detected voltage value and a set voltage value set in advance; a second comparative arithmetic circuit outputting a second level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a second detected voltage value and the set voltage value; and a switching circuit switching between the value of the first level control signal and the value of the second level control signal depending on a switching timing setting value.

A matching device includes: a directional coupler that detects a traveling wave and a reflected wave; a matching circuit that has a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit that calculates a reflection coefficient based on the traveling wave and the reflected wave and controls a capacitance value VCof the first variable capacitance capacitor and a capacitance value VCof the second variable capacitance capacitor. The control unit changes VCsuch that VCmoves toward a circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, fine-tunes VCon the basis of a predicted intersection point with the circle, and when the distance between the calculated reflection coefficient and the circle becomes a predetermined value or less, changes VCsuch that the calculated reflection coefficient approaches zero, and fine-tunes VC

Matching device and matching method

A matching unit includes a directional coupler for detecting a travelling wave and a reflected wave; a matching circuit including a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit for controlling VCand VCof the first and the second variable capacitance capacitor by calculating a reflection coefficient based on the travelling wave and the reflected wave. When a distance between the calculated reflection coefficient and a circle described by a trace of the reflection coefficient which passes through a matching point on a Smith chart is greater than a predetermined value, the control unit changes VCof the second variable capacitance capacitor and the calculated reflection coefficient to make the distance within the predetermined value. When the distance becomes within the predetermined value, the control unit changes VCof the first variable capacitance capacitor and makes the calculated reflection coefficient smaller.

Matching unit and matching method

The present invention provides a mobile station which can reduce the power consumption of an operation of intermittent reception in accordance with an elapsed time after transmission or reception. When a mobile station intermittently receives signals from another mobile station after transmission or reception, the interval of intermittent reception is not made constant, but the interval of the intermittent reception is made short immediately after transmission or reception, and as the time passes thereafter, the interval of the intermittent reception is made longer than that immediately after transmission or reception. Further, when the interval of the intermittent reception is made long and becomes a predetermined interval, the interval of the intermittent reception can be maintained at the predetermined interval and made constant thereafter. Accordingly, the interval of a reception timing can be set in accordance with a state after completion of reception or completion of transmission.

Growing community of inventors

Tokyo, Japan

Yoshiyuki Oshida