Dmg Mori Seiki Co., Ltd.

Yoshiyuki Mitera

Hideaki Tamiya

Yusuke Nakamura

A first light flux serving as object light is caused to enter a member to be measured, and reflected light thereof is caused to enter again the member to be measured after being diffracted by a first diffraction grating. Then, the second-time reflected light of the first light flux by the member to be measured is diffracted by a second diffraction grating. By diffracting the first light flux by the second diffraction grating, a change of the optical path length caused by tilting of the member to be measured is cancelled.

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Isehara, Japan

Yoshiyuki Mitera