Denki Kagaku Kogyo Kabushiki Kaisha

Tokyo Electron Limited

Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Denka Company Limited

Yoshiyuki Kobayashi

Katsuya Okumura

Masamitsu Itoh

Hiroyuki Kurimura

Yoshitsugu Goto

Kimihiko Yoda

Yukihiro Morimoto

Satoshi Taga

Takuya Okada

Kazuhiro Oshima

Isamu Ichikawa

Tomoyuki Nara

Taro Inada

Gosuke Nakajima

Hayato Miyazaki

Norihiro Shimizu

Takako Hoshino

Hiroshi Suto

Kenji Fukao

Keita Kobayashi

Takayuki Nagumo

There is provided a plasma processing apparatus including a focus ring capable of preventing a part of a heat transfer sheet from adhering to and remaining on a mounting table. The plasma processing apparatus comprises: a chamber for performing a plasma process on a target object; a mounting table configured to mount thereon the target object; and a focus ring configured to surround the target object, the focus ring being in contact with the mounting table via a flexible heat transfer sheet. Further, the heat transfer sheet has a contact surface in contact with the mounting table and an anti-adhesion layer formed on the contact surface, and the anti-adhesion layer is located between said contact surface of the heat transfer sheet and a mounting surface of the mounting table. Furthermore, the anti-adhesion layer contains heat conductive particulates, and the heat transfer sheet is formed in an annular shape.

Plasma processing apparatus

According to one embodiment, a reticle chuck cleaner for cleaning a reticle chuck of an EUV exposure apparatus includes a substrate having a shape to be carried to the reticle chuck of the EUV exposure apparatus, and an adhesive formed on one of the main surfaces of the substrate.

Reticle chuck cleaner

A curable resin composition that is adhesive and transparent. The curable resin composition comprises (1) a polymerizable vinyl monomer, (2) a curing agent, (3) a reducing agent, and (4) an acrylic block copolymer having a structure represented by formula (1):[a]-[b]-[a]&#x2003;&#x2003;(1)wherein [a] and [a] each independently represents a polymer block which consists mainly of structural units derived from an alkyl acrylate and/or an alkyl methacrylate and has a glass transition temperature of 90&#xb0; C. or higher, and [b] represents a polymer block which consists mainly of structural units derived from an alkyl acrylate and/or an alkyl methacrylate and has a glass transition temperature of &#x2212;10&#xb0; C. or lower, the copolymer satisfying the relationship (total mass of [a] and [a]/(mass of [b])=5/95 to 80/20.

Curable resin composition, adhesive composition, cured object or composite

There is provided a focus ring capable of preventing a part of a heat transfer sheet from adhering to and remaining on a mounting table. The focus ring is arranged to surround a periphery of a substrate mounted on the mounting table having a temperature control device. Further, the focus ring includes a flexible heat transfer sheet. Furthermore, the focus ring is in contact with the mounting table via the heat transfer sheet, and the heat transfer sheet has a contact surface in contact with the mounting table and an anti-adhesion layer formed on the contact surface.

Focus ring and manufacturing method therefor

Provided is a curable composition which contains: an organic peroxide encapsulated in microcapsules which further contains a plasticizer; an accelerator which reacts with the organic peroxide to accelerate polymerization; (meth)acrylate compounds which may contain a (meth)acrylate having a carboxylic group and a (meth)acrylate having an alicyclic hydrocarbon; and a multifunctional (meth)acrylate different from the (meth)acrylate having a carboxylic group. The curable composition exhibits a quick curing rate.

Curable composition

Provided is an adhesive (meth)acrylic resin composition being high in adhesiveness and capable of affording an adhered body which can be used at high temperatures of 250&#xb0; C. or higher, and possessing low outgassing property and heat resistance. A (meth)acrylic resin composition including (A) a polyfunctional (meth)acrylate, and (B) a photopolymerization initiator that exhibits a mass loss on heating of 15% by mass or less when increasing temperature from 30&#xb0; C. to 250&#xb0; C. at a temperature increase rate of 10&#xb0; C./min. under nitrogen flow, wherein the glass transition temperature of a cured body obtained from the composition is 250&#xb0; C. or higher.

(Meth)acrylic resin composition

Disclosed is a method for separating a bonded body, whereby the bonded body can be separated easily. Specifically disclosed is a method for separating bonded bodies that includes a step that irradiates excimer light with a central wavelength of 1 to 300 nm on to a bonded body that has been formed by using an adhesive composition to bond substrates together, which includes and is formed by one type or two or more types of meth (acrylate) that have one or more (meth)acryloyl groups, and by hardening of said adhesive composition. At least one of the substrates is permeable to the excimer light.

Method for separating bonded bodies using excimer light irradiation

Disclosed are a probe inspecting method for confirming the state of a probe for inspecting electric characteristics of an object to be inspected; and a curable resin composition for use in the method. The method is applied to repeat inspections and comprises the steps of bringing a cured resin of a curable resin composition into contact with a probe for inspecting electric characteristics of an object to be inspected, transferring a probe mark of the probe to the cured resin, confirming the state of the probe based on the transferred probe mark, and, after the transfer of the probe mark of the probe, heating the cured resin to a temperature at or above the glass transition temperature of the cured resin to erase the probe mark of the probe.

Probe inspecting method and curable resin composition

An energy ray-curable resin composition comprising (A) a (meth)acrylate having a molecular weight of from 500 to 5,000, of which the main chain backbone is at least one member selected from the group consisting of a polybutadiene, a polyisoprene and hydrogenated products thereof and which has at least one (meth)acryloyl group at an end of the main chain backbone or in a side chain, (B) a monofunctional (meth)acrylate having a Cunsaturated hydrocarbon group via an ester bond, (C) a hydroxyl group-containing (meth)acrylate, (D) a polyfunctional (meth)acrylate, (E) a photopolymerization initiator, and (F) an antioxidant which exhibits equally high adhesive strength to various objects to be bonded, has good heat and moisture resistance, excellent rigidity, low cure shrinkage and little adhesion strain is provided.

Growing community of inventors

Shibukawa, Japan

Yoshiyuki Kobayashi