Ibiden Company Limited

Tokyo Electron Limited

Kabushiki Kaisha Toshiba

Yoshiyuki Ido

Hisashi Kaneko

Nobuo Hayasaka

Takamasa Usui

Kiyoshi Takekoshi

Junichi Hagihara

Hisatomi Hosaka

Kunihiko Hatsushika

Masakazu Furukawa

A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.

Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method

An object to provide a hot plate making it possible to heat an object to be heated uniformly, and the hot plate of the present invention is characterized in that a resistance element having a thickness dispersion of &#xb1;3 &#x3bc;m or less is formed on an insulating substrate.

Hot plate and method of producing the same

An object of the present invention is to provide an inspecting device equipped with a probe card capable of inspecting an object to be inspected appropriately even at heating or cooling time. The inspecting device of the present invention is an inspecting device equipped with a performance substrate provided with a terminal for inspection; a contactor substrate provided with a probe contacting an object to be inspected; and a probe card intervening between the probe of conductor substrate and a terminal of performance substrate, wherein the probe card is a multi-layered substrate in which a resin thin film is laminated on a ceramic board.

Inspection apparatus and probe card

Growing community of inventors

Ibi-gun, Japan

Yoshiyuki Ido