Fanuc Corporation

Other

Fujitsu Fanuc Limited

Yoshiyuki Hayashi

Kosei Nakamura

Masami Kimijima

Kazuhisa Numai

Yohei Arimatsu

Hidenori Sato

Shigeaki Oyama

Hisashi Maeda

Toshio Ando

Shigeru Koyoshida

Noboru Iwamatsu

Described is a manufacturing method of a semiconductor integrated circuit device by depositing a silicon nitride film to give a uniform thickness over the main surface of a semiconductor wafer having a high pattern density region and a low pattern density region. This is attained by, upon depositing a silicon nitride film over a substrate having a high gate-electrode-pattern density region and a low gate-electrode-pattern density region by using a single-wafer cold-wall thermal CVD reactor, setting a flow rate ratio of ammonia (NH ) to monosilane (SiH ) greater than that upon deposition of a silicon nitride film over a flat substrate.

Manufacturing method of semiconductor integrated circuit device

Induced voltage reduction method and an induced voltage reduction

Squirrel-cage rotor for induction motor

Method of producing squirrel-cage rotor for induction motor

A squirrel-cage rotor (10) includes a laminated core (14) fixed to a rotor shaft (12), a plurality of secondary conductors (18) arranged respectively in a plurality of through holes (16) formed through the laminated core (14), a pair of end rings (20) connected to the secondary conductors (18) at axial ends of the laminated core (14), and a pair of reinforcing members (22, 23) respectively covering the end rings (20). The secondary conductors (18) and the end rings (20) are integrally formed through a casting process, and are connected with the laminated core (14) and the reinforcing members (22, 23). Each reinforcing member (22, 23) is formed as an annular element of high-rigidity material, and includes a cylindrical wall (26, 27) surrounding the cylindrical outer surface of the end ring (20), a multi-aperture wall (28, 29) provided with a plurality of apertures (32) which communicate respectively with the through holes (16) of the laminated core (14 ) and held between the end ring (20) and the laminated core (14), and an end wall (30, 31) brought into contact with the axial outer surface of the end ring (20).

Squirrel-cage rotor for high-speed induction motor

Rotor for a high speed induction type AC motor having a press fit

Winding arrangement in an AC motor

The stator of a built-in motor must be firmly and accurately mounted on the spindle head housing or the like of a machine tool. A stator core (10), i.e., a principal component of the stator is welded partially at the circumference (14) thereof, and then the circumference of the stator core (10) held by a mandrel is finished to an accurate outside diameter by grinding. The stator core (10) thus constructed is subjected to a deformation with a lapse of time after the mandrel has been removed. To solve this problem, each lamination (12) of the stator core (10) is coated with a thermosetting adhesive, to be thereby joined together, and each lamination (12) is provided with a plurality of pressed projections (22) to be joined together by weld portions (20) on the circumference of the stator core (10), or each lamination (12) is joined together by pressing a serrated bar (26) into a bore (24) thereof, without a pressed projection (22).

Process of structuring stator of built-in motor

Stator structure of built-in motor

AC spindle motor and method of changing rotating speed of same

Provided is a rotor structure by which slot ripple is reduced so that an a.c. synchronous servo motor can achieve a smooth rotation. A rotor structure is provided in which two rotor elements (30, 30') are juxtaposed and brought out of registration in a circular position by an angle (.theta.) corresponding to a half wave length of a slot ripple wave caused in a rotor having a prior structure, thereby each slot ripple wave caused by each rotor element (30, 30') is cancelled out by the other.

Rotor structures of A.C. synchronous servo motor

Rotor construction for high speed induction motor

Motor cooling system

Molding process for coating a motor stator

Growing community of inventors

Yamanashi, Japan

Yoshiyuki Hayashi