Tokyo Electron Limited

Tokyo Electron Sagami Limited

Yoshiyuki Harima

Wataru Okase

Yuki Osada

Yasushi Yagi

Takenobu Matsuo

Hiroshi Sato

Hiroki Taniyama

Satoshi Nakashima

Kiyoshi Mori

Yoshitsugu Tanaka

Jun Nakagomi

Kyungho Park

Yoshinori Kato

Tamio Endo

Tameyasu Hyakuzuka

Jun Yamauchi

An electric field sensor includes a probe, a cylindrical probe guide, an insulating member, a preload spring and a connector. The probe serves as an inner conductor of a coaxial transmission path and has a portion forming a monopole antenna at a tip end to be in constant contact with a microwave transmission window by a pressing force of a built-in spring thereof. The probe guide is disposed at an outer side of the probe and serves as an outer conductor of the coaxial transmission path. The insulating member is disposed between the probe and the probe guide. The preload spring preloads the probe guide downward and presses the probe guide so that the tip end of the probe guide comes in constant contact with the planar slot antenna. The connector is connected to the probe and the probe guide to connect coaxial signal cables for extracting signals.

Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus

Liquid treatment units are disposed in multi-tiers surrounding a main-arm . Among liquid treatment units, plating units M through M are disposed on a lower tier side, and a unit for post-treatment process such as a cleaning unit where a cleaner atmosphere is necessary is disposed on an upper tier side. Thereby, an improvement in an area efficiency and the formation and maintenance of a clean atmosphere can be simultaneously obtained.

Liquid treatment system and liquid treatment method

There is provided a cassette carrying-in system, which can rotate a cassette housing therein substrates to be treated so that the substrates are changed from a vertical state to a horizontal state and which can carry the cassette in, e.g., a load-lock chamber of a vacuum processing unit. The cassette carrying-in system is provided for carrying a cassette, in which a plurality of substrates to be processed are arranged in parallel, in a processing unit for treating the substrates. The cassette carrying-in system comprises: a moving body having a first supporting portion for holding a bottom portion of the cassette so that the substrates to be processed are arranged vertically, and a second supporting portion, which is rotatable with the first supporting portion and which supports thereon a side of the cassette when the cassette is inclined, the second supporting portion supporting thereon the side serving as a bottom of the cassette when the substrates to be processed are arranged horizontally; a rotating mechanism for rotating the first and second supporting portions so that the substrates in the cassette are changed between a vertical state and a horizontal state; and a running mechanism for running the moving body so that the cassette supported on the first and second supporting portions moves between inside and outside the processing unit.

System for carrying-in of cassette for substrates to be processed

A vertical heat treatment apparatus heat-treats wafers horizontally carried in a boat while keeping the boat vertical in a reaction tube. The apparatus includes a system for transferring the wafers between the boat and wafer carriers, a system for loading and unloading the wafer-carried boat into and out of the reaction tube, and a system for waiting the boat in which not-treated wafers are carried. An arm is provided to move the boat while supporting the boat vertically. The boat is moved by the arm among a first position where the wafer transferring system is located, a second position where the load and unload system is located and a third position where the boat waiting system is located. A system for engaging with the top of the boat is further located at the first position to fix the top of the boat when the wafers are transferred to and out of the boat by the wafer transfer system.

Vertical heat-treatment apparatus having boat transfer mechanism

Growing community of inventors

Zushi, Japan

Yoshiyuki Harima