Hitachi, Ltd.

Yoshitoshi Itoh

Chusuke Munakata

Atomi Noguchi

Katsuhiro Mizuno

A monitor for particles of various materials which counts the number of the particles on real-time and in situ basis. The monitor comprises a unit for illuminating an object to be inspected with an illumination light beam of a predetermined cross-sectional area, a unit for detecting a change in optical mode of the illumination light beam caused by the particles being contained in the inspected object and illuminated with the illumination light beam, the illuminating and detecting units being of a unitary structure, and a unit for counting an amount of the particles contained in the inspected object by using a change in intensity of an optically mode changed light beam.

Monitor for particles of various materials

In an apparatus for transmitting an optical image using an image guide which is equipped with dispersive devices, the invention has an advantage such that dispersive devices which are arranged in an objective lens system and an ocular lens system are attached by being rotated by only a constant angle in the same direction around their respective optical axes as rotational centers with respect to each of an edge surface and rear edge surface of the image guide.

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Ome, Japan

Yoshitoshi Itoh