Fujikin Inc.

Yoshitomo Kanai

Takeshi Nakamura

Takahiro Nozawa

A flow rate control device for rapidly adjusting a flow rate to a set flow rate is provided. A flow rate control device for controlling a flow rate of a fluid supplied to a controlled object to hold a flow rate set value in the controlled object includes a measured value acquisition unit acquiring a measured value by a flow rate sensor measuring a flow rate of the fluid, a setting value acquisition unit acquiring the flow rate set value of the fluid, an adjustment value determination unit determining a flow rate adjustment value different from the flow rate set value, and a drive control unit controlling the flow rate of the fluid by adjusting an opening position of a valve supplying the fluid to the controlled object to make a difference between the measured value and the flow rate adjustment value small.

Flow rate control device, flow rate control device control method, and flow rate control device control program

To provide a flow dividing system that has an improved degree of freedom in arrangement, is suitable for integration, and achieves reductions in the manufacturing costs and maintenance costs. A flow dividing system for controlling, upon dividing a single flow rate into multiple flow rates, the respective flow rates such that the ratio between the divided flow rates matches a preset flow rate ratio. The flow dividing system has: a manifoldfor dividing the single flow rate into the multiple flow rates; and multiple fluid control devicesM,S that are formed as separate bodies from the manifold, are disposed separately from and independently of each other, and respectively control the multiple flow rates. A master deviceM has communication unitM for transmitting a preset flow rate value based on the preset flow rate ratio to a slave deviceS and for receiving a flow rate detection value DQfrom the slave deviceS, and the slave deviceS has a communication unitS for receiving the preset flow rate value from the master deviceM and for transmitting the flow rate detection value DQto the master deviceM.

Flow dividing system

A pressure control device controls a flow rate of gas supplied to a pressure control target to maintain an inside of the pressure control target at set pressure. The pressure control device includes a controller that is configured to: subtract, at a predetermined ratio, a signal related to the supply of gas from a set pressure signal indicating the set pressure, when gas is being supplied into the pressure control target in order to bring the inside of the pressure control target to the set pressure; compare a detected pressure signal indicating pressure within the pressure control target with the set pressure signal subjected to the subtraction; and control, on the basis of a comparison result obtained by the controller, a flow rate control valve which controls a flow rate of gas supplied to the pressure control target.

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Osaka, Japan

Yoshitomo Kanai