Omron Corporation

Stmicroelectronics S.r.l.

Yoshitaka Tatara

Hayami Hosokawa

Naru Yasuda

Toshiyuki Takahashi

Masayoshi Higuchi

Yukari Terakawa

Hiroto Nozawa

Yoshiyuki Komura

Kazuyuki Hayamizu

Takashi Kasai

Sebastiano Conti

Akihiko Sano

Naoki Yoshitake

Junichiro Yamada

Yusuke Nakagawa

Tetsuro Kubota

Koichi Ishimoto

Shin Inuzuka

A capacitance type sensor has a semiconductor substrate having a vertically opened penetration hole, a movable electrode film arranged above the penetration hole such that a periphery portion opposes to a top surface of the semiconductor substrate with a gap provided, and a fixed electrode film arranged above the movable electrode film with a gap with respect to the movable electrode film. A concave portion having at least a part thereof formed by an inclined surface is provided in the top surface of the semiconductor substrate in a region of the top surface of the semiconductor substrate which overlaps the periphery portion of the movable electrode film.

Capacitance type sensor and method of manufacturing the same

In an acoustic sensor, a conductive vibrating membrane and a fixed electrode plate are disposed above a silicon substrate with an air gap provided therebetween, and the substrate has an impurity added to a surface thereof. A microphone includes an acoustic transducer; and an acquiring section that acquires a change in pressure as detected by the acoustic transducer. A method for manufacturing an acoustic transducer including a semiconductor substrate, a vibrating membrane, which is conductive, and a fixed electrode plate and detecting a pressure according to a change in capacitance between the vibrating membrane and the fixed electrode plate, the method includes an impurity adding step of adding an impurity to a surface of the semiconductor substrate; and a forming step of forming the vibrating membrane and the fixed electrode plate above the semiconductor substrate to which the impurity has been added.

Acoustic sensor, acoustic transducer, microphone using the acoustic transducer, and method for manufacturing the acoustic transducer

A light guide includes a core made of material having translucency and an optical path conversion mirror for reflecting the signal light from the optical element and converting the optical path of the signal light formed on at least the core. The signal light is transmitted through the core by the reflection at the optical path conversion mirror. The optical path conversion mirror surface has an inclination angle &#x3b1; formed with a bottom surface of the core changing in the X-direction in a cross-sectional shape in which the core is cut at a YZ plane, the Y-direction being an optical axis direction of the optical element, the Z-direction being an advancing direction of the signal light of the light guide, and the X-direction being a direction perpendicular to both the Y-direction and the Z-direction.

Light guide, light transmission module, electronic device, and manufacturing method of light guide

An optical waveguide device includes a first substrate, where the first substrate includes a first plate and an optical waveguide region disposed on the first plate, and where the optical waveguide region includes a core for transmitting light and a cladding surrounding the core. The optical waveguide device further includes a second substrate, where the second substrate includes a second plate having a spacer. Additionally, a surface including the optical waveguide region of the first substrate opposes a surface including the spacer of the second substrate, the spacer is formed the region which is out of the core of the first substrate, a top surface of the spacer is in contact with the first substrate, the first substrate and the second substrate are bound with adhesive material, and the entire surface of the core is in contact with the adhesive material.

Optical waveguide device, manufacturing method thereof and optical communication apparatus

A method of manufacturing an optical waveguide device includes providing an optical fiber guide for fixing an optical fiber and optical element placing portions for providing element mounting benches outside a waveguide fixing region of a silicon substrate. A metallic thin film is formed outside the waveguide fixing region of the silicon substrate. After an optical waveguide substrate is bonded to a whole of an upper surface of the silicon substrate through a bonding resin which will become an upper cladding layer, the optical waveguide substrate is diced along an edge of the waveguide fixing region, and the optical waveguide substrate outside the waveguide fixing region is removed to expose the optical fiber guide and the optical element placing portions.

Optical waveguide device, manufacturing method thereof, and optical communication apparatus

Growing community of inventors

Nara, Japan

Yoshitaka Tatara