Nichia Corporation

Yoshitaka Kawata

Ryota Funakoshi

A light-emitting element includes a first n-side semiconductor layer, a first active layer, a first p-side semiconductor layer, a second n-side semiconductor layer, a second active layer, and a second p-side semiconductor layer, each made of a nitride semiconductor. The second n-side semiconductor layer includes first to third layers. The first layer includes indium and gallium and has a first n-type impurity concentration. The second layer includes indium and gallium and has a second n-type impurity concentration less than the first n-type impurity concentration. A value of a composition ratio of indium in the second layer is less than a value of a composition ratio of indium in the first layer. A thickness of the second layer is greater than a thickness of the first layer. The third layer includes gallium and has a third n-type impurity concentration less than the second n-type impurity concentration.

Light-emitting element

The forming of the tunnel junction layer includes forming a first n-type layer, forming a second n-type layer by introducing a first raw material gas into a furnace at a first temperature, the first raw material gas including a first gas having a first flow rate, and forming a third n-type layer by introducing a second raw material gas into a furnace at a second temperature, the second raw material gas including a second gas having a second flow rate, the second temperature being less than the first temperature. A first flow rate ratio of the first gas in the first raw material gas is greater than a second flow rate ratio of the second gas in the second raw material gas.

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Itano-gun, Japan

Yoshitaka Kawata