Mitsubishi Electric Corporation

Yoshitaka Kajiyama

Yoshiaki Hirata

Nobuaki Konno

Kozo Ishida

Takahiko Ito

Yusuke Shirayanagi

An ultrasonic transducer includes a diaphragm and a housing. The diaphragm can be vibrated. The housing is connected to the diaphragm. The diaphragm is provided with an opening. The housing is provided with an internal space. The internal space communicates with the opening. The diaphragm and the housing constitute an acoustic resonance structure to amplify with the opening and the internal space, ultrasound generated by vibration of the diaphragm, and they are integrally formed.

Ultrasonic transducer, distance measurement apparatus, and method of manufacturing ultrasonic transducer

An optical scanning device includes a reflector, a rotator, a first torsion beam and a second torsion beam, a first support part, a second support part, a first elastic layer, and a second elastic layer. The first elastic layer is superposed on the first torsion beam. The second elastic layer is superposed on the second torsion beam. A vertical dimension of an active layer is smaller than a horizontal dimension of the active layer in a cross section orthogonal to a direction in which the rotator is interposed between the first torsion beam and the second torsion beam. A material of the first elastic layer and the second elastic layer is higher in fatigue life than metal.

Optical scanning device, distance measuring device, and method for manufacturing optical scanning device

An optical scanning device includes a first structure and a second structure. The first structure includes a support, a driver, a first columnar body, a driving section, and a pair of beams. The support includes a support body and a flat section. The pair of beams connects the driver and the flat section. The driving section includes a coil, a pair of electrode pads, and a magnet. The second structure is provided with a reflector.

Optical scanning device and method for manufacturing same

A MEMS mirror device includes a frame body (an outer movable frame body), an inner movable member, a first beam, a reflective mirror member, and a coupling member. The inner movable member is disposed inside the frame body. The first beam couples the inner movable member rotatably to the frame body. The reflective mirror member has a reflective surface and a rear surface. The coupling member couples the reflective mirror member and the inner movable member. The first beam is coupled to the inner movable member at the rear surface of the reflective mirror member. The MEMS mirror device may be reduced in size.

MEMS mirror device and method of manufacturing the same

An optical scanning device includes a mirror part having a mirror surface configured to reflect light, N support cantilevers supporting the mirror part swingably, N drive cantilevers, and a plurality of driving piezoelectric elements secured on N drive cantilevers. The mirror part precesses by setting the frequency of AC voltage applied to each of a plurality of piezoelectric elements to a determined common value and setting the phase of AC voltage applied to each of a plurality of piezoelectric elements to a value determined according to the position of each piezoelectric element.

Growing community of inventors

Chiyoda-ku, Japan

Yoshitaka Kajiyama