Hitachi, Ltd.

Yoshitaka Goto

Isao Ishikawa

Michiyasu Itoh

A charged-particle energy analyzer having means for irradiating a sample with a primary electron beam, deflecting electrode means which focus charged particle flux emitted from the sample onto a center axis of the primary electron beam or onto an identical circumference with its center on the axis, a slit disposed at the focus point of the charged particles, an energy analyzer whose object point lies at the focus point, a detector for detecting the charged particles analyzed by the energy analyzer, and charged particle flux deflecting means provided between the sample and the detector, for shielding by one part of the charged particle flux focused in a true circular form, to thereby make it possible not only to set a wide accepted solid angle for signals but also to get an information as to the concave or convex surface condition of the sample at the measured portion.

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Sayama, Japan

Yoshitaka Goto