Anelva Corporation

Canon Anelva Corporation

Yoshiro Shiokawa

Megumi Nakamura

Toshihiro Fujii

Harumi Maruyama

Yoshiki Hirano

Tohru Sasaki

Qiang Peng

Yasuyuki Taneda

Kiyoshi Hoshino

Masao Takayanagi

Munetaka Nakata

Aiko Wada

The present invention provides a device for measuring a mean free path capable of measuring directly the mean free path of a charged particle, a vacuum gauge, and a method for measuring a mean free path. The device for measuring a mean free path according to one embodiment of the invention includes an ion source for generating an ion, a collector () for detecting the number of first charged particles being charged particles having a first flight distance Lthat is a flight distance of zero or more from the ion source, and a collector () for detecting the number of second charged particles having a second flight distance longer than the first flight distance. The control part of the device calculates the mean free path from a ratio between the numbers of the first and second charged particles.

Device for measuring mean free path, vacuum gauge, and method for measuring mean free path

The present disclosure provides an ion detector for improving the effect of electric field for pulling in an ion to be detected to a first-stage electrode of a secondary electron multiplier (SEM), and improving the effect of a stray light reduction. In one example embodiment, an ion detector includes a SEM, and a lead-in electrode for pulling in an ion to a first-stage electrode side of the SEM. At least one of the area of the lead-in electrode and a potential difference between the lead-in electrode and neighboring electrodes of the lead-in electrode, the neighboring electrode being an electrode not of the SEM, is set so that the light amount of internal-stray light generated inside the detector entering the first-stage electrode is not more than that of external-stray light generated outside the detector entering the first-stage electrode, when an ion is introduced into the detector.

Ion detector for mass spectrometry, method for detecting ion, and method for manufacturing ion detector

A mass spectrometer includes an ionization chamber () which generates fragment-free ions to be detected from an introduced gas to be detected, and a mass spectrometer chamber () including a mass spectrometer () which fractionates by mass the ions to be detected that are transported from the ionization chamber and which detects the ions. The mass spectrometer further includes a probe () which holds a liquid sample or a solid sample and causes the liquid sample or the solid sample to generate the gas to be detected upon heating by a heating means, and a gas introduction means () which introduces a predetermined gas from the probe to the ionization chamber to transport, to the ionization chamber, the gas to be detected that is generated at the probe.

Mass spectrometer and mass spectrometry method

The present invention maintains a stable emission amount from an emitter. In an embodiment of the present invention, a solid sample or a liquid sample is heated to gasify an object to be measured contained in the solid sample or the liquid sample, thereby forming a neutral gaseous molecule, and a metal ion emitted from an emitter having an oxidized surface is attached to the neutral gaseous molecule to ionize the neutral gaseous molecule, which is subjected to mass spectrometry. The solid sample or the liquid sample is a sample that emits a reducing gas by heating. The heating for gasifying the object to be measured is performed at a temperature lower than the vaporization temperature of the solid sample or the liquid sample and not less than the vaporization temperature of the object to be measured, and an oxidizing gas is provided to the emitter.

Mass spectrometry and mass spectrometer used for the same

An internal standard material to be added to a specimen containing a material to be measured when measuring the content of the material to be measured by performing mass spectrometry on the specimen includes a hindered phenol compound.

Internal standard material, resin composition, and measurement method

A mass spectrometer system comprises a chamber having an ion emitting unit to emit metal ions in the chamber with a communicating hole; a neutral molecule introduction unit; another gas introduction unit; a controller controlling a temperature of a region where metal ions attach to the neutral molecules; and a mass analyzer for the neutral molecules with the metal ions, wherein plotting an attachment energy of the metal ions attached to the neutral molecules in the chamber along an abscissa and the temperature of the region where the metal ions attach to the neutral molecules along an ordinate, the controller adjusts the temperature of the region so as to fall within a range obtained by excluding a range corresponding to the temperature of the region from 150 to 200&#xb0; C. from a range surrounded by the temperatures of the region [&#xb0; C.]=150&#xd7;attachment energy [eV], 100&#xd7;attachment energy [eV]&#x2212;50, and 20&#xb0; C., and attachment energies [eV]=2.1 and 0.5.

Mass spectrometer system and mass spectrometry method

A mass spectrometer includes an ionization chamber, a temperature control unit which controls the temperature in the ionization chamber to vaporize a sample in at least one of solid and liquid state in the ionization chamber, an introduction unit which introduces the sample into the ionization chamber, an ion supply unit which supplies ions to the ionization chamber to ionize, in the ionization chamber, the sample vaporized in the ionization chamber, and a mass analyzer which measures the mass of the molecules of the ionized sample.

A Q-pole type mass spectrometer can be used under a high-pressure atmosphere of more than 0.1 Pa. The Q-pole type mass spectrometer can analyze the mass of gas molecules continuously, and can separate mass properly even if an ion is injected at high speed in order to reduce the influence of an end electric field near an end face (fringing) of the Q-pole. The motion of the ions to be measured in the diameter direction is independent of the motion of ions in the axial direction within the Q-pole region of the Q-pole type mass spectrometer. In the Q-pole type mass spectrometer installed in a reduced pressure atmosphere, the motion of ions to be measured in the axial direction advancing from an ion source toward a collector, is controlled within the Q-pole region so as to separate the mass of the ions to be measured by Coulomb force generated by a quadrupole high-frequency electric field in the diameter direction.

Q-pole type mass spectrometer

An ion attachment mass spectrometry apparatus causing positively charged metal ions to attach to molecules of a gas to be measured in an attachment region to generate attached ions and then performing mass spectrometry on the attached ions by a mass spectrometer, has a metal ion selective disassociation unit for selectively making the metal ions attached to the specific molecules in the attachment region disassociate. By making the metal ions attached to the specific molecules such as HO disassociate, a state is formed where the metal ions are attached to only the sample gas to be measured and the reliability of measurement of the gas is improved.

Ion attachment mass spectrometry apparatus

An ion attachment mass spectrometry method causes positively charged metal ions generated in a metal ion generation region to attach to molecules of a measured gas in an attachment region to generate attached ions, and then performs mass spectrometry on the attached ions in a mass spectrometry region. In the method, further, a pressure of the attachment region is set so as to be included in a pressure range enabling free flight of the metal ions and the attached ions in the attachment region, an electrostatic field is formed for decelerating the metal ions in the attachment region, and only the measured gas is introduced to the attachment region. Thereby, quantitative analysis enabling accurate measurement of the concentration of the measured gas is realized.

Ion attachment mass spectrometry method

An apparatus for ion attachment mass spectrometry provided with an ion emitter for emitting positively charged metal ions, an ionization chamber for causing attachment of the metal ions to a gas to be detected, a third component gas introduction mechanism for introducing a third component gas into the ionization chamber, and a mass spectrometer for mass separation and detection of the detected gas with the metal ions attached. The third component gas introduction mechanism is provided with three types of third component gases and selectively introduces one type of third component gas from the three types of third component gases. Due to this, the occurrence of interference peaks due to macromers of third component gases with each other, macromers of third component gases and high concentration ingredients, etc. is prevented and accurate mass analysis made possible.

Method and apparatus for ion attachment mass spectrometry

An ionization apparatus according to the present invention has a mechanism for causing metal ions emitted from an ion emitter to attach to an introduced target gas so as to generate ions of the sample gas and emits the ions of the sample gas to a mass spectrometer. The mass spectrometer has a zone in which one or both of an electric field and magnetic field are formed. As the electrode for causing the generation of cleaning plasma in the ionization zone generating the ions of the sample gas, the ion emitter is used. The ion emitter causes the generation of plasma in connection with a hollow vessel and removes deposits on components facing the ionization zone by the plasma. The plasma cleaning process is performed consecutively at a suitable timing after the ionization process. Due to the above configuration, deteriorated performance in ionization can be restored in a short time, a memory effect can be prevented, and accurate mass spectrometry becomes possible. The ionization apparatus of the present invention is suitable for a mass spectrometry apparatus.

Ionization apparatus

An apparatus for ion attachment mass spectrometry provided with a reaction chamber for causing positively charged metal ions to attach to a gas to be detected; a mass spectrometer for mass separation and detection of the detection gas; an analysis chamber in which the mass spectrometer is placed; differential evacuation chambers for connecting the reaction chamber and analysis chamber; a data processor for receiving and processing the mass signal from the mass spectrometer; and vacuum gauges for measuring the total pressure of the reduced pressure atmosphere of the reduced pressure atmosphere reaction chamber, a differential evacuation chamber, and an analysis chamber. The total pressure signal from the vacuum gauge measured during the measurement is input to one of the data processor, introduction mechanism, and evacuation mechanism. The data processor has a processing means for performing quantitative analysis of each component utilizing the fact that sensitivity of each component has dependency on the total pressure of the reduced pressure atmosphere and that the dependency on total pressure differs for each component.

A reflection type ion attachment mass spectrometry apparatus is provided with a metal ion generation region, an attachment region and a mass spectrometry region. The metal ion generation region and the mass spectrometry region are formed as a common compartment and the attachment region is provided adjoining the common compartment. The attachment region has an electrostatic field generation unit for forming an electrostatic field in order to reflect the metal ions introduced from the metal ion generation region so as to guide them to the mass spectrometry region. Thereby, a trace ingredient can be detected with a high measurement sensitivity, the problems of disturbance of the mass spectrometer, deterioration of the metal ion emitter, the size of the apparatus, direct sampling, etc. are solved, and broad use in industry is possible.

Growing community of inventors

Hachioji, Japan

Yoshiro Shiokawa